Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions

  • S. F. Belykh
  • A. D. Bekkerman
  • A. B. Tolstogouzov
  • A. A. Lozovan
  • D. J. Fu


The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.


cluster ion source ion sputtering cascade amplification of cluster ion currents 


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  1. 1.
    S. F. Belykh, R. N. Evtukhov, Yu. N. Lysenko, and U. K. Rasulev, Rev. Sci. Instrum. 63, 2458 (1992).CrossRefGoogle Scholar
  2. 2.
    G. Gillen, L. King, B. Freibaum, R. Lareau, J. Bennett, and F. Chmara, J. Vac. Sci. Technol., A 19, 568 (2001).CrossRefGoogle Scholar
  3. 3.
    S. F. Belykh, V. V. Palitsin, I. V. Veryovkin, A. P. Kovarsky, J. H. Chang, A. Adriaens, M. Dowsett, and F. Adams, Rev. Sci. Instrum. 78, 085101 (2007).CrossRefGoogle Scholar
  4. 4.
    J. H. Chang, PhD Thesis (Univ. of Warwick, 2008), p.133.Google Scholar
  5. 5.
    S. F. Belykh, U. K. Rasulev, A. V. Samartsev, L. V. Stroev, and A. V. Zinoviev, Vacuum 56, 257 (2000).CrossRefGoogle Scholar
  6. 6.
    A. I. Fahey, Cluster Secondary Ion Mass Spectrometry: Principles and Applications, Ed. by C. M. Mahoney (John Wiley & Sons, Hoboken, NJ, 2013), p.57.Google Scholar
  7. 7.
    S. F. Belykh, A. B. Tolstoguzov, and A. A. Lozovan, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 9, 1144 (2015).CrossRefGoogle Scholar
  8. 8.
    Sputtering by Particle Bombardment, Ed. by R. Behrisch (Springer, Berlin, 1981), Issue 1, p.256.Google Scholar
  9. 9.
    G. Betz and W. Husinsky, Philos. Trans. R. Soc. London, Ser. A 362, 177 (2004).CrossRefGoogle Scholar
  10. 10.
    V. I. Matveev, S. F. Belykh, and I. V. Veryovkin, J. Tech. Phys. 69, 64 (1999).Google Scholar
  11. 11.
    V. I. Matveev and S. N. Kapustin, Bull. Russ. Acad. Sci.: Phys. 80, 113 (2016).CrossRefGoogle Scholar
  12. 12.
    S. F. Belykh, B. Habets, U. Kh. Rasulev, A. V. Samartsev, L. V. Stroev, and I. V. Veryovkin, Nucl. Instrum. Methods Phys. Res., Sect. B 164–165, 809 (2000).CrossRefGoogle Scholar
  13. 13.
    S. F. Belykh, A. B. Tolstoguzov, A. A. Lozovan, M. E. Aleshin, and I. A. Elantyev, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 9, 172 (2015).CrossRefGoogle Scholar
  14. 14.
    S. F. Belykh, A. B. Tolstoguzov, A. A. Lozovan, M. E. Aleshin, and I. A. Elantyev, J. Exp. Theor. Phys. (JETP) 118 (4), 560 (2014).CrossRefGoogle Scholar
  15. 15.
    S. F. Belykh, A. B. Tolstoguzov, and A. A. Lozovan, JETP Lett. 101 (9), 638 (2015).CrossRefGoogle Scholar
  16. 16.
    E. Fermi, Molecole e Cristalli (Nicola Zanichelli, Bologna, 1934).Google Scholar
  17. 17.
    B. M. Smirnov, Usp. Fiz. Nauk 164 (7), 665 (1994).CrossRefGoogle Scholar
  18. 18.
    T. T. Jarvi, J. A. Parakinen, A. Kuronen, and K. Nordlung, Europhys. Lett. 82, 26002 (2008).CrossRefGoogle Scholar
  19. 19.
    S. Zimmermann and H. M. Urbassek, Int. J. Mass Spectrom. 272, 91 (2008).CrossRefGoogle Scholar
  20. 20.
    Li Yang, M. P. Seah, E. H. Anstis, I. S. Gilmore, and J. L. S. Lee, J. Phys. Chem. C 116, 9311 (2012).CrossRefGoogle Scholar
  21. 21.
    C. K. Liang, S. V. Verkhoturov, L. J. Chtn, and E. A. Schweikert, Int. J. Mass Spectrom. 334, 43 (2013).CrossRefGoogle Scholar
  22. 22.
    S. F. Belykh, I. G. Gorelik, A. V. Zinoviev, S. N. Morozov, V. V. Palitsin, U. Kh. Rasulev, and A. Adriaens, in Proc. 12th Int. Conference on Secondary Ion Mass Spectrometry (Elsevier, Amsterdam, 2000), p.251.Google Scholar
  23. 23.
    S. F. Belykh, I. V. Veryovkin, V. V. Palitsin, A. V. Samartsev, A. Adriaens, and F. Adams, Int. J. Mass Spectrom. 237, 55 (2004).CrossRefGoogle Scholar
  24. 24.
    S. F. Belykh and R. N. Evtukhov, Prib. Tekh. Eksp. 2, 191 (1982).Google Scholar
  25. 25.
    D. A. Dahl, Simion 3D Version 8.0. User Manual (Idaho National Engineering and Environmental Laboratory, 2000).Google Scholar

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© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  • S. F. Belykh
    • 1
  • A. D. Bekkerman
    • 2
  • A. B. Tolstogouzov
    • 3
    • 4
  • A. A. Lozovan
    • 1
  • D. J. Fu
    • 5
  1. 1.Moscow Aviation Institute (National Research University)MoscowRussia
  2. 2.Schulich Faculty of ChemistryTechnion‒Israel Institute of TechnologyHaifaIsrael
  3. 3.Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e TecnologiaUniversidade Nova de LisboaCaparicaPortugal
  4. 4.Ryazan State Radio Engineering UniversityRyazanRussia
  5. 5.Key Laboratory of Artificial Micro- and Nano-Materials of the Ministry of Education, School of Physics and TechnologyWuhan UniversityWuhanChina

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