On the Precision Preparation of Samples for Atom Probe Tomography Using a Focused Ion Beam in a SEM

  • V. V. Khoroshilov
  • O. A. Korchuganova
  • A. A. Lukyanchuk
  • O. A. Raznitsyn
  • A. A. Aleev
  • S. V. Rogozhkin


Atom probe tomography is a modern and dynamically developing method of material investigation. It allows studies of the structure of matter at the atomic scale. The physical fundamentals of this method require a specific size, shape and conductivity type of the sample. To expand the analytical capabilities of atom probe tomography, a technique for preparing samples using a focused ion beam in a scanning electron microscope is studied and implemented in this work. The basic principles of this approach are demonstrated; its advantages, disadvantages and important practical aspects are described. To protect a fabricated sample from the influence of environment upon its transport to an atom probe tomograph, it is suggested a platinum coating be used. The atom-probe-tomography analysis of samples prepared with a focused ion beam is carried out. The effects of using such a sample preparation technique are studied.


Atom probe tomography (АРТ) scanning electron microscope (SEM) focused ion beam FIB sample preparation 


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Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  • V. V. Khoroshilov
    • 1
  • O. A. Korchuganova
    • 1
  • A. A. Lukyanchuk
    • 1
  • O. A. Raznitsyn
    • 1
  • A. A. Aleev
    • 1
  • S. V. Rogozhkin
    • 1
    • 2
  1. 1.Institute of Theoretical and Experimental Physics NRC “Kurchatov Institute”MoscowRussia
  2. 2.National Research Nuclear University Moscow Engineering Physics Institute (MEPhI)MoscowRussia

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