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Backscattered electron imaging of micro- and nanostructures: 5. SEM signal formation model

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Abstract

A semiempirical model describing how images are formed in a scanning electron microscope operating in the backscattered electron collection mode is discussed. The model involves four imaging mechanisms. The model and the experiment are compared for grooves in silicon with rectangular and trapezoidal relief profiles.

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Authors and Affiliations

  1. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    Yu. A. Novikov

  2. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Moscow, 115409, Russia

    Yu. A. Novikov

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  1. Yu. A. Novikov
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Original Russian Text © Yu.A. Novikov, 2016, published in Poverkhnost’, 2016, No. 9, pp. 12–26.

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Novikov, Y.A. Backscattered electron imaging of micro- and nanostructures: 5. SEM signal formation model. J. Surf. Investig. 10, 892–905 (2016). https://doi.org/10.1134/S1027451016050116

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