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Procedure for determining defects in sputtered clusters of ionic crystals

Abstract

The results obtained using methods of total current spectroscopy (TCS) and secondary-ion mass spectroscopy (SIMS) under ion bombardment of LiF crystals are analyzed. It is shown that the majority of the products of crystal sputtering contain point defects. A procedure for determining defects in sputtered clusters of ionic crystals is developed.

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Correspondence to U. B. Sharopov.

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Original Russian Text © U.B. Sharopov, B.G. Atabaev, R. Djabbarganov, M.K. Kurbanov, M.M. Sharipov, 2016, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2016, No. 2, pp. 91–95.

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Sharopov, U.B., Atabaev, B.G., Djabbarganov, R. et al. Procedure for determining defects in sputtered clusters of ionic crystals. J. Synch. Investig. 10, 245–249 (2016). https://doi.org/10.1134/S1027451016010328

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  • DOI: https://doi.org/10.1134/S1027451016010328

Keywords

  • total current spectroscopy
  • LiF crystals
  • Cs+-ion bombardment
  • point defects