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Procedure for determining defects in sputtered clusters of ionic crystals

Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques volume 10, pages 245–249 (2016)Cite this article

Abstract

The results obtained using methods of total current spectroscopy (TCS) and secondary-ion mass spectroscopy (SIMS) under ion bombardment of LiF crystals are analyzed. It is shown that the majority of the products of crystal sputtering contain point defects. A procedure for determining defects in sputtered clusters of ionic crystals is developed.

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Authors and Affiliations

  1. Institute of Ion-Plasma and Laser Technologies, Uzbekistan Academy of Sciences, Tashkent, 100125, Uzbekistan

    U. B. Sharopov, B. G. Atabaev, R. Djabbarganov, M. K. Kurbanov & M. M. Sharipov

Authors
  1. U. B. Sharopov
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  2. B. G. Atabaev
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  3. R. Djabbarganov
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  4. M. K. Kurbanov
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  5. M. M. Sharipov
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Correspondence to U. B. Sharopov.

Additional information

Original Russian Text © U.B. Sharopov, B.G. Atabaev, R. Djabbarganov, M.K. Kurbanov, M.M. Sharipov, 2016, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2016, No. 2, pp. 91–95.

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Sharopov, U.B., Atabaev, B.G., Djabbarganov, R. et al. Procedure for determining defects in sputtered clusters of ionic crystals. J. Synch. Investig. 10, 245–249 (2016). https://doi.org/10.1134/S1027451016010328

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  • DOI: https://doi.org/10.1134/S1027451016010328

Keywords

  • total current spectroscopy
  • LiF crystals
  • Cs+-ion bombardment
  • point defects