Skip to main content

Virtual measuring instruments

Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques volume 10, pages 68–75 (2016)Cite this article

Abstract

A definition of virtual measuring instruments (MIs) is presented and their operation in measuring the characteristics of the objects under study is described. The objectives and tasks of virtual MIs, as well as their role in proving the correctness of solutions to incorrect inverse problems, are discussed.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

USD 39.95

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

References

  1. Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Proc. SPIE 6260, 626013–1 (2006). doi: 10.1117/12.683398

    Article  Google Scholar 

  2. Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov, and P. A. Todua, Meas. Sci. Technol. 18, 367 (2007). doi: 10.1088/0957-0233/18/2/S07

    Article  Google Scholar 

  3. Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Meas. Tech. 52, 142 (2009).

    Article  Google Scholar 

  4. Ch. P. Volk, E. S. Gornev, Yu. A. Novikov, Yu. I. Plotnikov, A. V. Rakov, and P. A. Todua, in Linear Measurements in Micrometer and Nanometer Ranges for Microelectronics and Nanotechnology, Moscow: Nauka, 2006, p. 77. (Proc. IOFAN, Vol. 62) [in Russian].

    Google Scholar 

  5. Ch. P. Volk, E. S. Gornev, Yu. A. Novikov, Yu. V. Ozerin, Yu. I. Plotnikov, A. M. Prokhorov, and A. V. Rakov, Russ. Microelectron. 31, 207 (2002).

    Article  Google Scholar 

  6. V. P. Gavrilenko, V. B. Mityukhlyaev, Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov, and P. A. Todua, Meas. Sci. Technol. 20, 20–1 (2009). doi: 10.1088/09570233/20/8/084022

    Article  Google Scholar 

  7. Ch. P. Volk, V. B. Mityukhlyaev, Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Meas. Tech. 52, 713 (2009).

    Article  Google Scholar 

  8. Yu. A. Novikov, A. V. Rakov, and M. N. Filippov, Bull. Russ. Acad. Sci.: Phys. 62, 439 (1998).

    Google Scholar 

  9. W. T. Eadie, D. Dryard, F. E. James, M. Roos, and B. Sadoulet, Statistical Methods in Experimental Physics (North-Holland, Amsterdam, London, 1971).

    Google Scholar 

  10. I. N. Silin, FUMILI, CERN Program Library, D510 (1983).

    Google Scholar 

  11. Applications of Monte Carlo Method in Science and Engineering, Ed. by S. Mordechai (InTech, Croatia, 2011).

  12. G. R. Brandes, K. F. Canter, T. N. Horsky, P. H. Lippel, and A. P. Mills, Rev. Sci. Instrum. 59, 228 (1988).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    Yu. A. Novikov

  2. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Moscow, 115409, Russia

    Yu. A. Novikov

Authors
  1. Yu. A. Novikov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Yu. A. Novikov.

Additional information

The article is published in the original.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Novikov, Y.A. Virtual measuring instruments. J. Synch. Investig. 10, 68–75 (2016). https://doi.org/10.1134/S1027451015060166

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1027451015060166

Keywords

  • virtual measuring instrument
  • virtual test object
  • simulation
  • Monte Carlo method