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Production of carbon films by the electric arc sputtering of graphite in a magnetic field

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Abstract

The results of experimental investigation of the effect of a magnetic field on the structural-morphological features of carbon films deposited by the electric arc sputtering of graphite are presented. It is found that the action of a magnetic field on the plasma flux causes the formation of a practically smooth amorphous film. However, the magnetic field prevents the formation of graphitic nanoclusters (∼4 wt %) in the film, the presence of which is the cause of the field emission of electrons at a low threshold field strength of ∼7.5 V/μm.

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Correspondence to E. Z. Khamdohov.

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Original Russian Text © E.Z. Khamdohov, R.Sh. Teshev, Z.M. Khamdohov, A.Z. Khamdohov, Z.H. Kalajokov, H.H. Kalajokov, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 12, pp. 68–73.

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Khamdohov, E.Z., Teshev, R.S., Khamdohov, Z.M. et al. Production of carbon films by the electric arc sputtering of graphite in a magnetic field. J. Surf. Investig. 8, 1306–1310 (2014). https://doi.org/10.1134/S1027451014060317

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  • DOI: https://doi.org/10.1134/S1027451014060317

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