Abstract
The influence of the defocusing of a low-voltage scanning electron microscope (SEM) probe on its electron-density distribution is analyzed. It is demonstrated that a focused probe has a Gaussian shape. A defocused probe can be represented as the sum of several Gaussian probes different in intensity shifted relative to each other. The proposed method can be efficiently used by both consumers preferring SEM applications for scientific and technological purposes and SEM designers who want to improve their operating capabilities.
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Novikov, Y.A. Dependence between the defocusing of the low-voltage SEM probe and its electron-density distribution. J. Surf. Investig. 8, 1252–1257 (2014). https://doi.org/10.1134/S1027451014060135
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DOI: https://doi.org/10.1134/S1027451014060135