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Virtual scanning electron microscope: 1. Objectives and tasks of virtual measuring instruments

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Abstract

Virtual measuring instruments, as well as their operation, are described during measurement of the characteristics of the objects under study. Their objectives and tasks are discussed in proving the correctness of solving incorrect inverse problems. It is demonstrated that a virtual scanning electron microscope must inevitably be created to solve various problems of micro- and nanotechnologies.

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Authors and Affiliations

  1. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    Yu. A. Novikov

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  1. Yu. A. Novikov
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Correspondence to Yu. A. Novikov.

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Novikov, Y.A. Virtual scanning electron microscope: 1. Objectives and tasks of virtual measuring instruments. J. Surf. Investig. 8, 1244–1251 (2014). https://doi.org/10.1134/S1027451014060123

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  • DOI: https://doi.org/10.1134/S1027451014060123

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