Abstract
The elastic moduli, microhardnesses, and deformation coefficients of aluminum films and bulk materials (Al, Si, Bi, and Ti) are determined using a combination of indentation and atomic force microscopy methods. The surface morphology of aluminum films with a thickness of 10, 200 and 1000 nm on silicon substrates is studied in the initial state and after indentation with loads in the range from 2 to 100 g. The stages of the fragmentation and agglomeration of grains under the influence of loads are revealed experimentally. The effect of the initial grain size, film substructure, and load values on the processes of deformation structuring is determined.
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References
V. K. Grigorovich, Hardness and Microhardness of Metals (Nauka, Moscow, 1976) [in Russian].
S. I. Bulychev and V. P. Alekhin, Testing of Materials by the Continuous Indentation of the Indentor (Mashinostroenie, Moscow, 1990) [in Russian].
A. C. Fischer-Cripps, Nanoindentation, 2nd Ed. (Springer, New York, 2004).
W. C. Oliver and G. M. Pharr, J. Mater. Res. 19, 3 (2004).
Yu. I. Golovin, Phys. Solid State 50, 2205 (2008).
A. Gouldstone, N. Chollacoop, M. Dao, et al., Acta Mater. 55, 4015 (2007).
Yu. S. Boyarskaya, D. Z. Grabko, and M. S. Kats, Physics of Microindentation Processes (Shtiintsa, Chisinau, 1986) [in Russian].
Springer Handbook of Nanotechnology, Ed. by B. Bhushan (Springer, Berlin, 2007).
V. L. Mironov, Principles of Scanning Probe Microscopy (Ross. Akad. Nauk, Nizh. Novgorod, 2004) [in Russian].
J. J. Roa, E. Jimenez-Pique, T. Puig, et al., Thin Solid Films 519, 2470 (2011).
E. A. Levashov, M. I. Petrzhik, F. V. Kiryukhantsev-Korneev, et al., Metallurgiya, No. 5, 79 (2012).
T. A. Kuznetsova, M. A. Andreev, L. V. Markova, et al., Mater. Tekhnol. Instrum. 11, 105 (2006).
T. A. Kuznetsova, M. A. Andreev, L. V. Markova, et al., J. Frict. Wear 28, 279 (2007).
T. A. Kuznetsova, M. A. Andreev, L. V. Markova, et al., Belarus Patent No. 11103, Byull. No. 5 (64) (2008), p. 125.
D. V. Shtanskii, Usp. Khim. 76, 501 (2007).
M. K. Tripp, C. Stampfer, D. C. Miller, et al., Sens. Actuators A: Phys. 130–131, 419 (2006).
A. I. Belyaev, Metallurgy of Light Metals (Metallurgiya, Moscow, 1970) [in Russian].
E. N. Glazkov, Bismuth (Fan, Tashkent, 1969) [in Russian].
M. G. Mil’vidskii, Semiconductor Materials in Modern Electronics (Metallurgiya, Moscow, 1986) [in Russian].
A. V. Tarasov, Titanium Metallurgy (Akademkniga, Moscow, 2003) [in Russian].
D. V. Orlova, Phys. Solid State 55, 353 (2013).
A. S. Vereshchaka and I. P. Tret’yakov, Cutting Tool with Wear-Resisting Coatings (Mashinostroenie, Moscow, 1986) [in Russian].
High-Melting Materials in Engineering, The Handbook, Ed. by A. T. Tumanov et al. (Mashinostroenie, Moscow, 1967) [in Russian].
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Original Russian Text © T.A. Kuznetsova, S.A. Chizhik, A.L. Khudoley, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 12, pp. 46–56.
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Kuznetsova, T.A., Chizhik, S.A. & Khudoley, A.L. Deformation structuring of aluminum films upon microindentation. J. Surf. Investig. 8, 1275–1285 (2014). https://doi.org/10.1134/S1027451014050115
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DOI: https://doi.org/10.1134/S1027451014050115