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Control of electron-probe-system parameters using maps of the intensity distribution of the secondary-emission signal

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Abstract

A new information format is suggested for secondary emission signals, i.e., a 3D map of the linear signal intensity, as an instrument for the adjustment, calibration, and further automatic control of the parameters off an electron beam and fast measurements during the 2D monitoring of micro- and nanostructures.

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Authors and Affiliations

  1. Institute of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432, Russia

    V. V. Kazmiruk, I. G. Kurganov & T. N. Savitskaya

Authors
  1. V. V. Kazmiruk
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  2. I. G. Kurganov
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  3. T. N. Savitskaya
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Corresponding author

Correspondence to V. V. Kazmiruk.

Additional information

Original Russian Text © V.V. Kazmiruk, I.G. Kurganov, T.N. Savitskaya, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 12, pp. 31–35.

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Kazmiruk, V.V., Kurganov, I.G. & Savitskaya, T.N. Control of electron-probe-system parameters using maps of the intensity distribution of the secondary-emission signal. J. Surf. Investig. 8, 1240–1243 (2014). https://doi.org/10.1134/S1027451014050073

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  • DOI: https://doi.org/10.1134/S1027451014050073

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