Abstract
In modern integrated-circuit (IC) technology, an increase in transistor density leads to the fact that the insulated current-carrying metallized layers occupy a continuously increasing part of the chip volume. The aluminum in these layers is often replaced by copper and tungsten. The spallation reaction of Wnuclei induced by protons with an energy of ∼1 GeV creates a huge number of isotopes of different elements (from O to Ta). Experimental data on cross sections of the aforementioned nuclear reactions and the average velocities of residual fission fragments have been published. In this work, the published data are analyzed and the ionization effects of certain fragments of the reaction W(p, X) are estimated. It is assumed that this reaction occurs in the sensitive regions of transistors in an IC manufactured via 3D technology with clips made from tungsten rods.
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Original Russian Text © V.Ya. Chumanov, A.G. Kadmenskii, N.G. Chechenin, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 12, pp. 36–45.
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Chumanov, V.Y., Kadmenskii, A.G. & Chechenin, N.G. Ionization effects coupled with the residual products of nuclear reactions induced by cosmic protons in the metallization layers of modern 3D integrated-circuit assemblies. J. Surf. Investig. 8, 1265–1274 (2014). https://doi.org/10.1134/S1027451014050048
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DOI: https://doi.org/10.1134/S1027451014050048