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Backscattered electron imaging of micro- and nanostructures: 1. Method of analysis

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Abstract

A method for analysis of the formation of backscattered electron scanning electron microscope (SEM) images is described. The results of studying the formation of SEM signals obtained upon scanning an angular structure are given. The mechanisms of the formation of images in the modes of backscattered and slow secondary electrons are described.

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Authors and Affiliations

  1. A.V. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    Yu. A. Novikov

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Original Russian Text © Yu.A. Novikov, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 8, pp. 46–57.

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Novikov, Y.A. Backscattered electron imaging of micro- and nanostructures: 1. Method of analysis. J. Surf. Investig. 8, 775–786 (2014). https://doi.org/10.1134/S1027451014040296

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  • DOI: https://doi.org/10.1134/S1027451014040296

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