Abstract
The capabilities of X-ray equipment produced by Radicon Ltd. for the high-resolution structural investigation of single crystals and thin films using different methods including high-resolution methods, are demonstrated. A double-crystal DSO-1T X-ray diffractometer with a large sample-to-detector distance and a narrow slit in front of the detector allows one to perform high-quality mapping of the GaAs/GaP/Si heteroepitaxial structure in reciprocal space. A new double-crystal PDP console for the DRON-3 diffractometer provides the mapping of large wafers through the use of rocking curves. A new specialized X-ray DSO-2-01 diffractometer equipped with a motorized console for linear displacement of detector and rotary slit changer in front of the detector ensures automatic crystal orientation and precise measurements of the crystal lattice. All X-ray diffractometers manufactured by Radicon have rather flexible software including a custom macros editor.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
V. N. Korneev, N. I. Ariskin, V. M. Aul’chenko, et al., Poverkhnost’, No. 10, 24 (2004).
V. N. Korneev, V. A. Shlektarev, A. V. Zabelin, et al., J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 2, 872 (2008).
A. N. Artemiev, A. D. Belyaev, N. A. Artemiev, et al., J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 7, 916 (2013).
A. M. Batrakov, P. D. Voblyi, I. V. Il’in, et al., J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 5, 1038 (2011).
A. M. Afanas’ev, M. A. Chuev, R. M. Imamov, et al., Poverkhnost’, No. 12, 11 (1999).
D. K. Bowen and B. K. Tanner, High Resolution X-ray Diffractometry and Topography (Taylor & Francis, London, 1998; Nauka, St.-Petersburg, 2002).
I. A. Prokhorov, Yu. A. Serebryakov, E. N. Korobeinikova, et al., J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 1, 255 (2007).
P. G. Muzykov, A. Yu. Razumovskii, T. S. Sudarshan, et al., Zavod. Labor. Diagn. Mater. 69(12), 24 (2003).
A. E. Blagov, P. A. Prosekov, Yu. V. Grishchenko, et al., J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 3, 447 (2009).
A. E. Blagov, M. V. Koval’chuk, V. G. Kon, et al., J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 5, 822 (2011).
A. M. Afanasiev, P. A. Aleksandrov, and R. M. Imamov, X-Ray Diffraction Structural Diagnostics in the Studies of Near-Surface Layers of Single Crystals (Nauka, Moscow, 1986) [in Russian].
N. N. Novikova, M. V. Koval’chuk, N. D. Stepina, et al., J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 5, 816 (2011).
A. P. Vasilenko, I. D. Loshkarev, A. Yu. Razumovskii, et al., in Proceedings of the 2nd International Young Scientists School-Seminar on Modern Methods of Diffraction Data Analysis (Velik. Novgorod, 2008), p. 76.
I. D. Loshkarev, A. P. Vasilenko, and E. M. Trukhanov, in Proceedings of the 2nd International Young Scientists School-Seminar on Modern Methods of Diffraction Data Analysis (Velik. Novgorod, 2008), p. 113.
A. Yu. Razumovskii, M. A. Chernov, A. P. Vasilenko, et al., in Proceedings of the 6th International Scientific Seminar on Modern Methods of Diffraction Data Analysis and Actual Problems of X-Ray Optics (Velik. Novgorod, 2013), p. 114.
E. M. Trukhanov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 4, 36 (2010).
L. M. Plyasova, I. Yu. Molina, N. P. Stepina, et al., J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 5, 120 (2011).
A. V. Kolesnikov, E. M. Trukhanov, A. S. Il’in, and I. D. Loshkarev, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 8(4), 647 (2014) [this issue].
I. D. Loshkarev, A. P. Vasilenko, M. A. Putyato, et al., in Proceedings of the 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (Erlagol, 2010), p. 84.
V. A. Nikolaenko, V. A. Morozov, and N. I. Kasianov, Rev. Int. Hautes Temp. Refract. 13, 17 (1976).
W. L. Bond, Acta Crystallogr. 13, 814 (1960).
I. D. Loshkarev, Candidate’s Dissertation in Physics and Mathematics (Inst. Semiconductor Physics, Novosibirsk, 2013).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.Yu. Razumovsky, M.A. Chernov, A.P. Vasilenko, I.D. Loshkarev, E.M. Trukhanov, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 7, pp. 24–29.
Rights and permissions
About this article
Cite this article
Razumovsky, A.Y., Chernov, M.A., Vasilenko, A.P. et al. X-ray equipment for laboratory and synchrotron studies of thin-film crystalline structures. J. Surf. Investig. 8, 641–646 (2014). https://doi.org/10.1134/S1027451014040132
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1027451014040132