Abstract
It is established that, during the process of the molecular-beam epitaxy of InAs on a GaAs substrate, additional absorption of thermal radiation occurs as the film thickness increases, and, as a consequence, the heterostructure temperature becomes higher than the initial temperature in an uncontrolled way. The nonsteady-state mode of film growth leads to structure degradation. Calculation of the heterostructure overheating makes it possible to adjust the substrate temperature during growth.
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Original Russian Text © A.V. Katsyuba, A.A. Velichko, V.A. Ilyushin, G.F. Sivykh, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 7, pp. 70–73.
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Katsyuba, A.V., Velichko, A.A., Ilyushin, V.A. et al. Analysis of the temperature instability of an InAs/GaAs heterostructure during the process of molecular-beam epitaxy. J. Surf. Investig. 8, 686–688 (2014). https://doi.org/10.1134/S1027451014040077
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DOI: https://doi.org/10.1134/S1027451014040077