Abstract
Carbon-carbon electrode sputtering in the accelerating negatively charged grid of an ion source is investigated. It is ascertained that complicated fractal-like structures of sputtered material atoms are formed during the sputtering process. Possible conditions and causes underlying their formation and probable models of growth thereof caused by similar physical processes are discussed.
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References
L. B. Begrambekov, S. Brosset, E. Delshambre, et al., Izv. Akad. Nauk, Ser. Fiz. 68, 328 (2004).
J. D. Williams, M. L. Johnson, and D. D. Williams, in Proceedings of the 40th Joint Propulsion Conference (Fort Lauderdale, Florida, 2004), AIAA-2004-3788.
D. M. Goebel, in Proceedings of the 41st Joint Propulsion Conference (Tucson, AZ, 2005), AIAA-2005-4237.
T. Burtseva, A. Hassanein, I. Ovchinnikov, and V. Titov, J. Nucl. Mater. 290–293, 1059 (2001).
B. M. Smirnov, Physics of Fractal Clusters (Nauka, Moscow, 1991) [in Russian].
A. T. Forrester, Large Ion Beams (Wiley, New York, 1988; Mir, Moscow, 1991).
O. A. Gorshkov, V. A. Muravlev, and A. A. Shagaida, Hall and Ion Electric Propulsion for Spacecraft, Ed. by A. S. Koroteev (Mashinostroenie, Moscow, 2008) [in Russian].
Sputtering by Particle Bombardment I, Ed. by R. Behrisch (Springer, Berlin, 1981; Moscow, Mir, 1984).
Yu. A. Mikhailin, Construction Polymeric Composite Materials (Nauchn. Osnovy Tekhnologii, St.-Petersburg, 2008) [in Russian].
N. V. Pleshivtsev, Cathod Sputtering (Atomizdat, Moscow, 1968) [in Russian].
H. Leiter, R. Kukies, R. Killinger, et al., in Proceedings of the 42nd Joint Propulsion Conference (Sacramento, CA, 2006), AIAA-2006-4667.
A. P. Babichev, N. A. Babushkina, A. M. Bratkovskii, et al., Physical Values, the Handbook, Ed. by I. S. Grigor’ev and E. Z. Meilikhov (Energoatomizdat, Moscow, 1991) [in Russian].
B. C. Satishkumar, P. J. Thomas, A. Govindaraj, and C. N. R. Rao, Appl. Phys. Lett. 77, 2530 (2000).
Zhenyu Yao, Xi Zhu, Xiaoxu Li, and Yi Xie, Carbon 45, 1566 (2007).
N. Kh. Dzhemilev, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 6, 654 (2012).
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Original Russian Text © S.V. Madeev, A.A. Semenov, S.A. Khartov, I.I. Shkarban, 2013, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2013, No. 10, pp. 26–31.
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Madeev, S.V., Semenov, A.A., Khartov, S.A. et al. Fractal-like structures formed in the interelectrode gap during grid ion-source electrode sputtering. J. Surf. Investig. 7, 938–943 (2013). https://doi.org/10.1134/S1027451013050352
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DOI: https://doi.org/10.1134/S1027451013050352