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Scanning electron microscope resolution: 2. Resolution measurements using structures with a rectangular profile

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Abstract

Different techniques for estimating the resolution of a scanning electron microscope are considered. A method for determining the resolution using reduced standard deviations of the distances between reference points which characterize features of the profile of the test object measured at video signals is proposed. Measurements of the resolution of scanning electron microscopes using test objects that represent slitlike grooves in silicon with a rectangular profile are exemplified.

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Authors and Affiliations

  1. A.M. Prokhorov Institute of General Physics, Russian Academy of Sciences, ul. Vavilova 38, Moscow, 117991, Russia

    Yu. A. Novikov

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  1. Yu. A. Novikov
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Original Russian Text © Yu.A. Novikov, 2013, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2013, No. 8, pp. 105–112.

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Novikov, Y.A. Scanning electron microscope resolution: 2. Resolution measurements using structures with a rectangular profile. J. Surf. Investig. 7, 802–809 (2013). https://doi.org/10.1134/S1027451013040368

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  • DOI: https://doi.org/10.1134/S1027451013040368

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