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Spreading of an SR beam spot (diameter 0.5 μm, 95 eV) photoelectron image on the surface of WO3 − x films

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Abstract

The 2D-photoemission image of the beam spot was obtained for the first time for the W5+ oxidation state on the preliminary irradiated WO3 − x thin film surface, created by scanning of the SR beam over the film surface. The W5+ beam profile intensity was found to spread up to a distance of 3.2 μm for an amorphous film and 5.5 μm for a polycrystalline film, it exceeds considerably the beam spot size. The image saturation dose was reached faster for a polycrystalline film. Among the possible mechanisms explaining this phenomenon, for the case of an almost unchangeable O2s state under irradiation, a choice was made in favor of a photon-generated charge diffusion due to low-energy secondary electrons from photoemission, which produce the “coloration” effect, e− + W6+ (W5+) W5+ → W5+(W4+). The O512-eV Auger peak was found to degrade at the distance of 1.5–2 mm outside the beam spot under long-time electron beam irradiation, which is attributed to electron-stimulated oxygen desorption and outdiffusion.

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  1. Russian Research Centre Kurchatov Institute, Moscow, 123182, Russia

    N. Yu. Svechnikov

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  1. N. Yu. Svechnikov
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Original Russian Text © N.Yu. Svechnikov, 2011, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 1, pp. 25–34.

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Svechnikov, N.Y. Spreading of an SR beam spot (diameter 0.5 μm, 95 eV) photoelectron image on the surface of WO3 − x films. J. Surf. Investig. 5, 21–29 (2011). https://doi.org/10.1134/S1027451011010186

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