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Structure of Ba0.7Sr0.3TiO3 films grown by chemical solution deposition on polycor substrates

  • XV Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation of Solids (REM-2007)
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Abstract

The structure of barium strontium titanate (BST) films grown by chemical solution deposition on polycor substrates was studied by transmission electron microscopy, high-resolution microscopy, and x-ray diffraction analysis. It was found that a grain structure inhomogeneous in cross section is formed after two-step crystallization at T = 700 and 950°C. There are equiaxed grains (44.2 nm in average size) in the BST-polycor interfacial region and a multilevel columnar structure (grain height up to 150 nm) with {100} texture in the film bulk. Grain growth inhibition during high-temperature annealing and underlayer formation in the interfacial region are caused by a change in the substrate structure, i.e., grain reorientation and {112} texture formation.

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Authors and Affiliations

  1. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 119333, Russia

    O. M. Zhigalina & D. N. Khmelenin

  2. State Institute of Radio Engineering, Electronics, and Automatics, pr. Vernadskogo 78, Moscow, 117454, Russia

    K. A. Vorotilov & A. S. Sigov

Authors
  1. O. M. Zhigalina
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  2. K. A. Vorotilov
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  3. D. N. Khmelenin
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  4. A. S. Sigov
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Original Russian Text © O.M. Zhigalina, K.A. Vorotilov, D.N. Khmelenin, A.S. Sigov, 2008, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 9, pp. 3–8.

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Zhigalina, O.M., Vorotilov, K.A., Khmelenin, D.N. et al. Structure of Ba0.7Sr0.3TiO3 films grown by chemical solution deposition on polycor substrates. J. Surf. Investig. 2, 677–682 (2008). https://doi.org/10.1134/S1027451008050017

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  • DOI: https://doi.org/10.1134/S1027451008050017

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