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Formation of two-component two-phase metal films at elevated temperatures

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Abstract

This paper is devoted to the study of two-component thin films deposited at elevated temperatures. The dependence of plasma-assisted film deposition from a flow of sputtered Cu and Fe atoms on the substrate temperature and type, concentration of sputtered components in the flow, and film thickness is investigated.

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Authors and Affiliations

  1. Moscow Engineering Physics Institute (State University), Moscow, Russia

    L. B. Begrambekov, A. A. Gordeev & Ya. A. Sadovskii

Authors
  1. L. B. Begrambekov
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  2. A. A. Gordeev
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  3. Ya. A. Sadovskii
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Additional information

Original Russian Text © L.B. Begrambekov, A.A. Gordeev, Ya.A. Sadovskii, 2008, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 5, pp. 109–112.

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Begrambekov, L.B., Gordeev, A.A. & Sadovskii, Y.A. Formation of two-component two-phase metal films at elevated temperatures. J. Surf. Investig. 2, 419–422 (2008). https://doi.org/10.1134/S1027451008030178

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  • DOI: https://doi.org/10.1134/S1027451008030178

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