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Ion-beam reduction of the surface of higher oxides of molybdenum and tungsten

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Abstract

The process of reduction of the surface of oxides MoO3 and WO3 under irradiation by Ar+ and O +2 ions with an energy of 3 keV in high vacuum is investigated by X-ray photoelectron spectroscopy. It is shown that upon irradiation by Ar+ ions, lower and intermediate oxides and unoxidized metals are formed in the surface layers of higher oxides. Irradiation by O +2 ions mainly leads to formation of intermediate oxides with an insignificant content of lower oxides. It is found that the process of ion-beam reduction of the surface of oxides MoO3 and WO3 substantially depends on the ion type, irradiation dose, and difference in energy of the metal-oxygen bond in oxides.

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References

  1. G. Betz and G. Wehner, Sputtering by Particle Bombardment. Vol. II, Ed. by R. Behrisch (Springer, Berlin, 1983; Mir, Moscow, 1986), p. 24.

    Google Scholar 

  2. R. Kelly, J. Vac. Sci. Technol 21, 778 (1982).

    Article  CAS  Google Scholar 

  3. K. S. Kim, W. E. Baitinger, T. W. Amy, and N. Winograd, J. Electron. Spectrosc. 5, 351 (1974).

    Article  CAS  Google Scholar 

  4. R. Holm and S. Storp, Appl. Phys. 12, 101 (1977).

    Article  CAS  Google Scholar 

  5. T. J. Driscoll, L. D. McCormick, and W. C. Lederer, Surf. Sci. 187, 539 (1987).

    Article  CAS  Google Scholar 

  6. www.phy.cuhk.edu.hk/:_surface/XPSPEAK.

  7. F. Werfel and E. Minni, J. Phys. C: Solid State Phys. 16, 6091 (1983).

    Article  CAS  Google Scholar 

  8. T. H. Fleisch and G. J. Mains, J. Chem. Phys. 76, 780 (1982).

    Article  CAS  Google Scholar 

  9. J.-G. Choi and L. T. Thompson, Appl. Surf. Sci. 93, 143 (1996).

    Article  Google Scholar 

  10. M. A. Baker, R. Gilmore, C. Lenardi, and W. Gissler, Appl. Surf. Sci. 150, 255 (1999).

    Article  CAS  Google Scholar 

  11. N. V. Alov, Poverkhnost. Rentgen., Sinkhrotr. Neitron. Issled., No. 3, 6 (2005).

  12. N. V. Alov, Nucl. Instr. Methods Phys. Res. B 256, 337 (2007).

    Article  Google Scholar 

  13. R. J. Colton and J. W. Rabalais, Inorg. Chem. 15, 236 (1976).

    Article  CAS  Google Scholar 

  14. H. Y. Wong, C. W. Ong, R. W. M. Kwok, et al., Thin Solid Films 376, 131 (2000).

    Article  CAS  Google Scholar 

  15. A. Romanyuk, V. Melnik, and P. Oelhafen, Nucl. Instr. Methods Phys. Res. B 232, 358 (2005).

    Article  Google Scholar 

Download references

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Authors and Affiliations

  1. Faculty of Chemistry, Moscow State University, Vorob’evy gory, Moscow, 119991, Russia

    N. V. Alov, D. M. Kutsko & K. V. Bordo

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  1. N. V. Alov
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  2. D. M. Kutsko
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  3. K. V. Bordo
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Original Russian Text © N.V. Alov, D.M. Kutsko, K.V. Bordo, 2008, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 3, pp. 17–22.

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Alov, N.V., Kutsko, D.M. & Bordo, K.V. Ion-beam reduction of the surface of higher oxides of molybdenum and tungsten. J. Surf. Investig. 2, 184–188 (2008). https://doi.org/10.1134/S1027451008020043

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  • DOI: https://doi.org/10.1134/S1027451008020043

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