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Comparative Analysis of Algorithms for Solving Inverse Problems Related to Monochromatic Monitoring the Deposition of Multilayer Optical Coatings

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Abstract

The paper presents a comparative analysis of three fundamentally different algorithms for solving inverse problems of monitoring the layer thicknesses of optical coatings based on the data of monochromatic measurements of the reflection/transmission coefficients during deposition process. The previously developed geometric approach to the study of the thickness error correlation of deposited coatings is extended to the case of monochromatic measurements. A new parameter called the self-compensation factor was introduced to estimate the effect of error self-compensation. Its role in assessing the prospects for using various algorithms for coating deposition monitoring is shown.

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Funding

This work was supported by Russian Science Foundation, project no. 16-11-10219.

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Authors and Affiliations

  1. Research Computing Center, Lomonosov Moscow State University, 119234, Moscow, Russia

    I. V. Kochikov, A. V. Tikhonravov & S. A. Sharapova

  2. Moscow Center for Fundamental and Applied Mathematics, 119234, Moscow, Russia

    Yu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko, A. V. Tikhonravov & S. A. Sharapova

  3. Department of Physics, Lomonosov Moscow State University, 119991, Moscow, Russia

    Yu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko & A. G. Yagola

Authors
  1. I. V. Kochikov
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  2. Yu. S. Lagutin
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  3. A. A. Lagutina
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  4. D. V. Lukyanenko
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  5. A. V. Tikhonravov
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  6. S. A. Sharapova
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  7. A. G. Yagola
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Corresponding authors

Correspondence to I. V. Kochikov, Yu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko, A. V. Tikhonravov, S. A. Sharapova or A. G. Yagola.

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Kochikov, I.V., Lagutin, Y.S., Lagutina, A.A. et al. Comparative Analysis of Algorithms for Solving Inverse Problems Related to Monochromatic Monitoring the Deposition of Multilayer Optical Coatings. Comput. Math. and Math. Phys. 61, 1504–1510 (2021). https://doi.org/10.1134/S0965542521090116

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  • DOI: https://doi.org/10.1134/S0965542521090116

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