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Comparison of Algorithms for Determining the Thickness of Optical Coatings Online

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Abstract

The basic algorithms for determining the thicknesses of layers of deposited multilayer optical coatings are discussed and compared. Using a series of model numerical experiments, the advantage of one of these algorithms—the modified T-algorithm—is demonstrated; this algorithm reduces the influence of the effect of error accumulation in the determined thicknesses of layers.

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ACKNOWLEDGMENTS

This work was supported by the Russian Science Foundation, project no. 16-11-10219.

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Correspondence to T. F. Isaev, I. V. Kochikov, D. V. Lukyanenko, A. V. Tikhonravov or A. G. Yagola.

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Translated by A. Klimontovich

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Isaev, T.F., Kochikov, I.V., Lukyanenko, D.V. et al. Comparison of Algorithms for Determining the Thickness of Optical Coatings Online. Comput. Math. and Math. Phys. 59, 465–474 (2019). https://doi.org/10.1134/S0965542519030102

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