Abstract
Thin indium-tin oxide (ITO) films were obtained by pyrolysis of solutions of indium and tin extracts on glass substrates. The extraction pyrolysis (EP) technology uses inexpensive starting compounds and provides the required stoichiometric ratio of elements due to complete mixing of precursors in the organic solution. The thermal decomposition of the extracts occurs in a narrow temperature range of 350–400°C. X-Ray photoelectron spectroscopy (XPS) studies showed that the ITO films obtained by extraction pyrolysis have no impurities including carbon. The films have a nanocrystalline structure with a grain size of ∼6 nm according to XRD, AFM, and TEM studies. The optical transmission spectra showed that the films were highly transparent in the visible region of the spectrum and absorbed IR radiation at long and medium wavelengths.
Similar content being viewed by others
References
Fortunato, E., Ginley, D., Hosono, H., and Paine, D.C., Transparent conducting oxides for photovoltaics, Mater. Res. Bull., 2007, vol. 32, no. 3, pp. 242–247.
Katayama-Yoshida, H., Materials design for new functional semiconductors by initio electronic structure calculation, Materials, 1999, vol. 38, no. 2, pp. 134–143.
Exarhos, G.J. and Zhou, X.D., Discovery-based design of transparent conducting oxide films, Thin Solid Films, 2007, vol. 515, no. 18, p. 645.
Bright, C., Optical constants of evaporated and sputtered transparent conductive oxides, Proc. 36th Annual SVC Technical Conf., Dallas, Tex., 1993, p. 63.
Marcovitch, O., Klein, Z., and Lubezky, I., Transparent conductive indium oxide film deposited on low temperature substrates by activated reactive evaporation, Appl. Opt., 1989, vol. 28, no. 14, p. 2792.
Perriere, J., Defourneau, R., Laurent, A., and Morcrette, M., Growth of films by laser ablation, Physica C, 1999, vol. 311, no. 3, pp. 231–238.
Neifeld, R.A., Cunapala, S., and Liang, S., Synthesis of thin films by excimer laser, Appl. Phys. Lett., 1988, vol. 53, no. 8, pp. 703–704.
Gilbert, L.R., Maki, S.P., and McClure, D.J., Comparison of ITO Sputtering Process from Ceramic Alloy Target onto Room Temperature PET Substrates, Proc. 36th Annual SVC Technical Conf., Dallas, Tex., 1993, p. 236.
Shigeyuki Seki, Makoto Ogawa and Yutaka Sawada, Indium tin oxide thin films prepared by dip coating; dependence of resistivity on film thickness and annealing atmosphere, Jpn. J. Appl. Phys., 2001, vol. 40, pp. L1244–L1246.
Patrusheva, T.N., Rastvornye plenochnye tekhnologii (Solution-Derived Film Technologies), Krasnoyarsk: Sib. Federal. Univ., 2010.
Alam, M.J. and Cameron, D.C., Optical and electrical properties of transparent conductive ITO thin films deposited by sol–gel process, Thin Solid Films, 2000, vol. 377–378, pp. 455–459.
Rauf, A., Low resistivity and high mobility tin-doped indium oxide films, Mater. Lett., 1993, vol. 18, no. 3, pp. 123–127.
Ginley, D., Roy, B., Odeb, A., and Perkins, J., Nonvacuum and PLD growth of next generation TCO materials, Thin Solid Films, 2003, vol. 445, pp. 193–198.
Khol’kin, A.I. and Patrusheva, T.N., Ekstraktsionnopiroliticheskii metod.Poluchenie funktsional’nykh oksidnykh materialov (Extraction–Pyrolysis Method: Synthesis of Functional Oxide Materials), Moscow: Kom. Kniga, 2006.
Yurtov, E.V. and Murashova, N.M., Structuring in extraction systems of di(2-ethylheyl)phosphoric acid and metal compounds, Russ. J. Inorg. Chem., 2003, vol. 48, pp. 1096–1101.
Churaev, N.V., Thin liquid layers, Colloid J., 1996, vol. 58, no. 6, pp. 681–693.
Khol’kin, A.I., Gindin, L.M., Savkina, L.Ya., and Fleitlikh, I.Yu., Effect of dissociation of extractable compounds in organic phase on extraction equilibria of metals in systems with acidic extractants, Izv. Sib. Otd. Akad. Nauk SSSR, Ser. Khim., 1971, no. 4, pp. 65–72.
Bokhonov, B.B., Yukhin, Yu.M., Minina, A.V., and Mikhailov, K.Yu., Thermal decomposition of pharmaceutical bismuth carboxylates, Novye khimicheskie sistemy i protsessy v meditsibe: Mater. Mezhregional’noi nauchno-prakt. Konf. (“New Chemical Systems and Processes in Medicine,” Proc. Interregional Conf.), Novosibirsk, 2002, pp. 147–150.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © N.Yu. Snezhko, A.L. Belousov, A.V. Ryzhenkov, T.N. Patrusheva, Yu.L. Mikhlin, S.M. Zharkov, A.I. Khol’kin, 2014, published in Khimicheskaya Tekhnologiya, 2014, Vol. 15, No. 8, pp. 466–471.
Rights and permissions
About this article
Cite this article
Snezhko, N.Y., Belousov, A.L., Ryzhenkov, A.V. et al. Indium–tin oxide films obtained by extraction pyrolysis. Theor Found Chem Eng 49, 721–725 (2015). https://doi.org/10.1134/S0040579515050152
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0040579515050152