Abstract
Doped ultrafine silicon dioxide powder with a narrow particle size distribution was obtained by RF discharge-stimulated dichlorosilane (SiH2C) oxidation at a low pressure using isobutylene as the combustion inhibitor and chromium hexacarbonyl (Cr(CO)6) as the dopant. The formation and morphology of the ultrafine particles are governed by the parameters of the RF discharge and by the chemical mechanism of the combustion reaction yielding the aerosol. Submicron-sized filamentous carbon structures can be obtained by isobutylene decomposition under spark discharge conditions in the presence of a molybdenum metal catalyst.
Similar content being viewed by others
References
Fortov, V.E., Khrapak, A.G., Khrapak, S.A., Molotkov, V.I., and Petrov, O.F., Dusty Plasmas, Usp. Fiz. Nauk, 2004, vol. 174, no. 5, p. 495 [Phys.-Usp. (Engl. Transl.), vol. 174, no. 5, p. 447].
Rubtsov, N.M., Tsvetkov, G.I., and Chernysh, V.I., Kinetic Regularities of Solid-Phase Formation in the Branching Chain Reaction of Dichlorosilane Oxidation in RF Plasma at Low Pressures and 293 K, Mendeleev Commun., 2006, vol. 16, p. 38.
Ratnov, A.G., Rubtsov, N.M., Temchin, S.M., and Dement’ev, A.P., Deposition and Some Properties of Thin Silicon Dioxide Films Obtained by Monosilane and Dichlorosilane Oxidation at Low Temperatures and Pressures, Mikroelektronika, 1996, no. 1, p. 32.
Chen, M., Chen, C.M., and Chen, C.F., Precursors of Carbon Nanotube Synthesis, J. Mater. Sci., 2002, vol. 37, no. 17, p. 3561.
Suzdalev, I.P. and Suzdalev, P.I., Nanoclusters and Nanocluster Systems, Usp. Khim., 2001, vol. 70, no. 9, p. 203.
Sugano, T., Ikoma, T., and Takeisi, E., Vvedenie v mikroelektroniku (Introduction to Microelectronics), Moscow: Mir, 1988.
Fishmeister, Kh., Hot Isostatic Pressing, in Poroshkovaya metallurgiya (Powder Metallurgy), Kiev: Naukova Dumka, 1977, p. 87.
Elyutin, V.P. and Pavlov, Yu.A., Vysokotemperaturnye materialy (High-Temperature Materials), Moscow: Metallurgiya, 1972.
Rubtsov, N.M., Tsvetkov, G.I., and Chernysh, V.I., Factors in Phase Formation in the Heterogeneous Chain Oxidation of Dichlorosilane at Low Pressures, Teor. Osn. Khim. Tekhnol., 2004, vol. 38, no. 5, p. 546 [Theor. Found. Chem. Eng. (Engl. Transl.), vol. 38, no. 5, p. 516].
Chernysh, V.I., Rubtsov, N.M., and Tsvetkov, G.I., Flame Emission Spectra in the Region 400–600 nm during Low-Pressure Silane and Dichlorosilane Oxidation, Kinet. Katal., 2002, vol. 43, no. 4, p. 485 [Kinet. Catal. (Engl. Transl.), vol. 43, no. 4, p. 445].
Rubtsov, N.M., Ryzhkov, O.T., and Chernysh, V.I., Reaction Products of Dichlorosilane Oxidation As Studied by IR Spectrophotometry, Kinet. Katal., 1995, vol. 36, no. 5, p. 645 [Kinet. Catal. (Engl. Transl.), vol. 36, no. 5, p. 589].
De Bleecker, K., Bogaerts, A., and Goedheer, W., Modelling of Nanoparticle Coagulation and Transport Dynamics in Dusty Silane Discharges, New J. Phys., 2006, vol. 178, no. 8, p. 2.
Slezov, V.V., Kinetics of the Diffusional Decomposition of Supersaturated Solid Solutions, Fiz. Tverd. Tela, 1959, vol. 1, no. 9, p. 433.
Geguzin, Ya.E. and Kaganovskii, Yu.S., Diffusional Mass Transfer in Discontinuous Films, Usp. Fiz. Nauk, 1978, vol. 125, no. 3, p. 489.
Geguzin, Ya.E., Kaganovskii, Yu.S., Kalinin, V.V., and Slezov, V.V., Coalescence of Discontinuous Gold Films, Fiz. Tverd. Tela, 1970, vol. 12, p. 1953.
Barin, I., Thermochemical Data of Pure Substances, Berlin: VCH, 1989, parts I, II.
Pierse, R. and Gaydon, A., The Identification of Molecular Spectra, New York: Academic, 1941.
Till, W.C. and Luxon, J.T., Integrated Circuits: Materials, Devices and Fabrication, Englewood Cliffs, N.J.: Prentice-Hall, 1982.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © N.M. Rubtsov, B.S. Seplyarskii, V.I. Chernysh, G.I, Tsvetkov, 2009, published in Teoreticheskie Osnovy Khimicheskoi Tekhnologii, 2009, Vol. 43, No. 4, pp. 379–384.
Rights and permissions
About this article
Cite this article
Rubtsov, N.M., Seplyarskii, B.S., Chernysh, V.I. et al. Phase formation in gas-phase combustion and pyrolysis reactions under spark and radio-frequency discharge conditions. Theor Found Chem Eng 43, 361–365 (2009). https://doi.org/10.1134/S0040579509040022
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0040579509040022