Skip to main content
SpringerLink
Log in

Temperature effect on the formation of a relief of diamond-like carbon coatings and its modification by ion bombardment

  • Structure, Phase Transformations, and Diffusion
  • Published:
The Physics of Metals and Metallography Aims and scope Submit manuscript

Abstract

Diamond-like coatings (DLCs) have been obtained on a UVNIIPA-001 unit employing the method of pulse arc sputtering of a graphite target. DLCs of about 1.5 μm thick were applied onto substrates of the R6M5 steel. The relief of the coatings that were deposited using different temperature regimes has been studied. It has been established that a temperature rise of the surface of a growing DLC (condensation at a high frequency of arc pulses f) leads to the growth of films with numerous protrusions on their surface. The deposition of films at a low frequency f is more preferable to form smooth and hard DLCs under the conditions of unfiltered beam of carbon ions. The modification of the surface of diamond-like carbon coatings after their application has been investigated upon bombardment with accelerated ions of inert gas (argon) or chemically active oxygen. It has been established that the argon-ion bombardment is more preferable to smooth out the DLC relief. It has been shown that the relief of DLCs must be taken into account when measuring their microhardness, whereas the transformation of interatomic bonds in the near-surface layers after ion irradiation should be taken into consideration when analyzing the coatings by the methods whose informative depth is several monolayers.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Y. Lifshitz, “Diamond-Like Carbon—Present Status,” Diamond Relat. Mater. 8, 1659–1676 (1999).

    Article  CAS  Google Scholar 

  2. I. I. Aksenov and V. E. Strel’nitsky, “Synthesis of Hydrogen-Free Diamond-Like Coatings,” in Proceedings of ISFTE-12, Kharkov, Ukraine (Kharkov, 2001), pp. 96–103.

  3. D. M. Sanders and A. Anders, “Review of Cathodic Arc Deposition Technology at the Start of the New Millennium,” Surf. Coating Technol. 133–134, 78–90 (2000).

    Article  Google Scholar 

  4. M. I. Samoilovich and A. F. Belyanin, “Diamond and Diamond-Like Carbon Films: Formation and Structure,” in Diamond Films and Films of Related Materials. Proceedings of Kharkov Science Assembly ISFTF-15 (Kharkov, 2003), pp. 6–38.

  5. A. B. Vladimirov, I. Sh. Trakhtenberg, O. M. Bakunin, et al., “The Effect of Substrate and DLC Morphology on the Tribological Properties Coating,” Diamond Relat. Mater. 9, 838–842 (2000).

    Article  CAS  Google Scholar 

  6. V. N. Inkin, G. G. Kirpilenko, and A. J. Kolpakov, “Internal Stresses in Ta-C Films Deposited by Pulse Arc Discharge Method,” Diamond Relat. Mater. 10, 1103–1108 (2001).

    Article  CAS  Google Scholar 

  7. V. E. Strel’nitskii, “Synthesis Processes and Physical Properties of Diamond-Like Carbon Coatings Obtained by Vacuum-Arc Method,” in Diamond Films and Films of Related Materials. Proceedings of Kharkov Science Assembly ISFTF-15 (Kharkov, 2003), pp. 104–115.

  8. I. Sh. Trakhtenberg, A. B. Vladimirov, V. A. Yugov, et al., “Certification of Mechanical Properties of Hard Diamond-Like Coatings (DLC),” Fiz. Met. Metalloved. 99(6), 103–107 (2005) [Phys. Met. Metallogr. 99, 649–653 (2005)].

    CAS  Google Scholar 

  9. Y. Lifshitz, G. D. Lempert, E. Grossman, et al., “Growth Mechanisms of DLC Films from C+ Ions: Experimental Studies,” Diamond Relat. Mater. 4, 318–323 (1995).

    Article  CAS  Google Scholar 

  10. A. B. Vladimirov, I. Sh. Trakhtenberg, S. A. Plotnilov, et al., “Modification of Amorphous DLC Films by Low Energy Ion Bombardment,” Diamond Relat. Mater. 5, 943–946 (1996).

    Article  Google Scholar 

  11. S. Logothetidis, Ch. B. Lioutas, and M. Gioti, “Post-Growth Modification of Amorphous Carbon Films under Ion Beam Bombardment: Grain Size Dependence on the Film Thickness,” Diamond Relat. Mater. 7, 449–453 (1998).

    Article  CAS  Google Scholar 

  12. I. Sh. Trakhtenberg, A. B. Vladimirov, A. P. Rubstein, et al., “The analysis of Microhardness Measurement Approach for Characterization of Hard Coatings,” Diamond Relat. Mater. 12, 1788–1792 (2003).

    Article  CAS  Google Scholar 

  13. A. P. Dementjev, K. I. Maslakov, K. Uemura, et al., “Identification of Chemical Bonds on Upper Layers of DLC Using Auger Spectroscopy and XPS,” in Proceeding of ADC/FCT 2003 Conference (2003), pp. 345–349.

  14. P. A. Arutyunov, A. L. Tolstikhina, and V. N. Demidov, “The Set of Parameters for Analysis of Roughness and Surface Microrelief of Materials in Scanning Probe Microscopy,” Zavod. Lab. 65(9), 27–37 (1999).

    Google Scholar 

  15. F. C. Ferrari, “Determination of Bonding in Diamond-Like Carbon by Raman Spectroscopy,” Diamond Relat. Mater. 11, 1053–1061 (2002).

    Article  CAS  Google Scholar 

  16. I. Sh. Trakhtenberg, A. P. Rubshtein, and A. B. Vladimirov, “Formation of Morphology of Surface of Diamond-Like Films Condensed upon Arc Deposition of Graphite in a Vaccum”, Fiz. Met. Metalloved. 100(1), 65–70 (2005) [Phys. Met. Metallogr. 100, 56–60 (2005)].

    CAS  Google Scholar 

  17. A. V. Dvurechenskii, V. A. Zinoviev, et al. “Morphology and Reconstruction of Surface during Ge/Si Heteroepitaxy under Low-Energy Ion Beam,” in Proceeding of 11th International Conference on Radiation Physics and Chemistry of Condensed Matter, Tomsk, Russia (Tomsk, 2000), pp. 238–242.

  18. M. Hakovirta, I. Koronen, R. Lappalainen, et al., “Protrusions on the Surface of Graphite Cathode Used in the Tetrahedral Amorphous Carbon Film Deposition,” Diamond Relat. Mater. 7, 23–35 (1998).

    Article  CAS  Google Scholar 

  19. K. Yamamoto, K. Wazumi, T. Watanabe, et al., “Tribological Properties of Diamond-Like Carbon Films Prepared by Mass-Separated Ion Beam Deposition,” Diamond Relat. Mater. 11, 1130–1134 (2000).

    Article  Google Scholar 

  20. Ye. L. Ostrovskaya and V. E. Strel’nitskij, “Effect of Micromechanical Properties of DLC Coatings on Their Frictional Behavior under Cryogenic Temperatures,” in Proceeding of 12th International Symposium ISTFE-12 (Kharkov, 2001), pp. 141–145.

  21. J. F. Ziegler and J. P. Biersack, The Stopping Range of Ion in Solids (Pergamon, New York, 1985).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Metal Physics, Ural Division, Russian Academy of Sciences, ul. S. Kovalevskoi 18, Ekaterinburg, 620041, Russia

    A. P. Rubshtein, I. Sh. Trakhtenberg, V. A. Yugov, A. B. Vladimirov, S. A. Plotnikov & Yu. S. Ponosov

Authors
  1. A. P. Rubshtein
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. I. Sh. Trakhtenberg
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. A. Yugov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. B. Vladimirov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. S. A. Plotnikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Yu. S. Ponosov
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Original Russian Text © A.P. Rubshtein, I.Sh. Trakhtenberg, V.A. Yugov, A.B. Vladimirov, S.A. Plotnikov, Yu.S. Ponosov, 2006, published in Fizika Metallov i Metallovedenie, 2006, Vol. 102, No. 6, pp. 671–677.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Rubshtein, A.P., Trakhtenberg, I.S., Yugov, V.A. et al. Temperature effect on the formation of a relief of diamond-like carbon coatings and its modification by ion bombardment. Phys. Metals Metallogr. 102, 626–631 (2006). https://doi.org/10.1134/S0031918X06120106

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0031918X06120106

PACS numbers

Search

Navigation