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Ellipsometric in situ diagnostics of the growth of porous anodic oxide films on aluminum

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Abstract

An ellipsometric in situ study of the growth of porous aluminum anodic oxide films on aluminum substrate has been performed. Theoretical calculations have been carried out to interpret the experimental dependences of ellipsometric parameters; they made it possible to identify the most characteristic details of anodic oxidation. It is shown that the ellipsometric method allows one to control in situ in real time a number of important layer parameters: growth rate, porosity, depth uniformity, and the state of interface. The ellipsometric measurements have also revealed high sensitivity to the presence of metal nanoparticles both in the bulk of a layer and on its surface.

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Authors and Affiliations

  1. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    V. A. Shvets, V. N. Kruchinin, S. V. Rykhlitskii & V. Yu. Prokop’ev

  2. Novosibirsk State University, Novosibirsk, Russia

    V. A. Shvets & V. Yu. Prokop’ev

  3. Institute of Solid-State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630128, Russia

    N. F. Uvarov

Authors
  1. V. A. Shvets
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  2. V. N. Kruchinin
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  3. S. V. Rykhlitskii
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  4. V. Yu. Prokop’ev
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  5. N. F. Uvarov
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Correspondence to V. A. Shvets.

Additional information

Original Russian Text © V.A. Shvets, V.N. Kruchinin, S.V. Rykhlitskii, V.Yu. Prokop’ev, N.F. Uvarov, 2015, published in Optika i Spektroskopiya, 2015, Vol. 118, No. 2, pp. 292–299.

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Shvets, V.A., Kruchinin, V.N., Rykhlitskii, S.V. et al. Ellipsometric in situ diagnostics of the growth of porous anodic oxide films on aluminum. Opt. Spectrosc. 118, 277–283 (2015). https://doi.org/10.1134/S0030400X15020162

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  • DOI: https://doi.org/10.1134/S0030400X15020162

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