Abstract
The discrete-source method is generalized to the case of studying the scattering of polarized light radiation by nonaxisymmetric nanosize substrate defects. Scattering properties of line pits and bumps are analyzed within the framework of a common mathematical model using a “fictitious” particle. Results of the numerical experiment are presented.
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Original Russian Text © N.V. Grishina, Yu.A. Eremin, A.G. Sveshnikov, 2014, published in Optika i Spektroskopiya, 2014, Vol. 117, No. 6, pp. 992–998.
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Grishina, N.V., Eremin, Y.A. & Sveshnikov, A.G. Analysis of scattering properties of nonaxiosymmetric substrate defects by the discrete-source method. Opt. Spectrosc. 117, 964–970 (2014). https://doi.org/10.1134/S0030400X14110071
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DOI: https://doi.org/10.1134/S0030400X14110071