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Profile of the refractive index distribution over the depth of (HfO2) x (Al2O3)1 − x films

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Abstract

Capabilities of the method of laser null ellipsometry for the study of optical parameters of thin films of multicomponent alloys are demonstrated. Films of alloys (HfO2) x (Al2O3)1 − x on single-crystal silicon are obtained by the chemical vapor deposition with the use of the following volatile compounds: hafnium dipivaloylmethanate (IV) and aluminum acetylacetonate (III). The selection of initial sets for their optical parameters is justified. The selected model is shown to correspond to experimental data. In films deposited from the mixture of precursors, the refractive index increases from a substrate to a film surface. Due to the separation of sources, films described by a single-layer model were deposited. This fact is indicative of the homogeneous distribution of components over the film thickness.

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References

  1. J. Robertson, Eur. Phys. J. Appl. Phys. 28, 265 (2004).

    Article  ADS  Google Scholar 

  2. J. Robertson, J. Appl. Phys. 104, 124111 (2008).

    Article  ADS  Google Scholar 

  3. O. Buiu, Y. Lu, S. Hall, et al., Thin Solid Films 515, 3772 (2007).

    Article  ADS  Google Scholar 

  4. Pan Kwi Park and Sang-Won Kang, Appl. Phys. Lett. 89, 192905 (2006).

    Article  ADS  Google Scholar 

  5. M. S. Lebedev, B. M. Ayupov, and T. P. Smirnova, Opt. Spektrosk. 106(1), 146 (2009) [Opt. Spectrosc. 106 (1), 139 (2009)].

    Article  ADS  Google Scholar 

  6. L. V. Yakovkina, V. N. Kichaĭ, T. P. Smirnova, V. V. Kaichev, Yu. N. Shubin, N. B. Morozova, K. V. Zherikova, and I. K. Igumenov, Neorg. Mat. 41, 1474 (2005) [Inorg. Mater. 41, 1300 (2005)].

    Google Scholar 

  7. T. P. Smirnova, V. V. Kaichev, L. V. Yakovkina, V. I. Kosyakov, S. A. Beloshapkin, F. A. Kuznetsov, M. S. Lebedev, and V. A. Gritsenko, Neorg. Mat. 44(9), 965 (2008) [Inorg. Mater. 44 (9), 965 (2008)].

    Article  Google Scholar 

  8. T. Maruyama and S. Arai, Appl. Phys. Lett. 60(3), 322 (1992).

    Article  ADS  Google Scholar 

  9. B. M. Ayupov, Optik 109(4), 145 (1998).

    MathSciNet  Google Scholar 

  10. B. M. Ayupov, Poverkhnost, No. 4, 59 (2000).

  11. D. M. Himmelblau, Applied Nonlinear Programming (McGraw-Hill, New York, 1972; Mir, Moscow, 1975).

    MATH  Google Scholar 

  12. B. M. Ayupov, E. F. Titova, and N. P. Sysoeva, Élektron. Tekhnika, Ser. Mikroélektronika 3, 126 (1985).

    Google Scholar 

  13. J. F. Nelder and R. A. Mead, Comp. J 7(4), 308 (1964).

    Google Scholar 

  14. N. P. Krylov and N. V. Shinkevich, Vestnik Udmurtskogo Universiteta, No. 4, 65 (2006).

  15. A. S. Korotkov and V. V. Atuchin, Opt. Commun. 281, 2132 (2008).

    Article  ADS  Google Scholar 

  16. P. P. Semyannikov, I. K. Igumenov, S. V. Trubin, T. P. Chusova, and Z. I. Semenova, Thermochim. Acta 451, 80 (2006).

    Article  Google Scholar 

  17. K. V. Zherikova, N. B. Morozova, L. N. Zelenina, S. V. Sysoev, T. P. Chusova, and I. K. Igumenov, J. Therm. Anal. Calorim. 92, 729 (2008).

    Article  Google Scholar 

  18. B. M. Ayupov, S. F. Devyatova, V. G. Erkov, and L. A. Semenova, Russ. Microelectron. 37(3), 141 (2008).

    Article  Google Scholar 

  19. B. M. Ayupov, V. V. Atuchin, T. I. Grigor’eva, L. D. Pokrovskiĭ and M. S. Lebedev, Izv. Vyssh. Uchebn. Zaved., Fiz., No. 5, 15 (2006) [Russ. Phys. J. 49 (5), 468 (2006)].

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia

    M. S. Lebedev

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  1. M. S. Lebedev
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Correspondence to M. S. Lebedev.

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Original Russian Text © M.S. Lebedev, 2009, published in Optika i Spektroskopiya, 2009, Vol. 107, No. 5, pp. 817–821.

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Lebedev, M.S. Profile of the refractive index distribution over the depth of (HfO2) x (Al2O3)1 − x films. Opt. Spectrosc. 107, 776–779 (2009). https://doi.org/10.1134/S0030400X09110149

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  • DOI: https://doi.org/10.1134/S0030400X09110149

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