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Wet Chemical Methods of HgCdTe Surface Treatment

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Abstract

Chemical pretreatment and surface cleaning is a key procedure of semiconductor technologies. Development of methods for the preparation of mercury cadmium telluride (HgCdTe) surfaces is of interest because this material has a wide range of known and potential applications in photoelectronics. This work reports an XPS and AFM study of the effect of various chemical treatments on the chemical composition and micro-morphology of the HgCdTe surface. Among all considered etchants, only ammonium hydroxide effectively removes the native oxide of HgCdTe without leaving a surface layer of metallic tellurium, while preserving nearly stoichiometric chemical composition of the surface. The optimal time of aqueous ammonia treatment is determined.

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REFERENCES

  1. W. Pan, G. Umana-Membreno, J. Antoszewski, W. Lei, R. Gu, H. Kala, N. Dehdashtiakhavan, and L. Faraone. Narrow bandgap HgCdTe technology for IR sensing and imaging focal plane arrays. Proc. SPIE, 2022, 12271, 1. https://doi.org/10.1117/12.2645270

    Book  Google Scholar 

  2. J. A. Wilson, E. A. Patten, G. R. Chapman, K. Kosai, B. Baumgratz, P. Goetz, S. J. Tighe, R. F. Risser, R. F. Herald, W. A. Radford, T. Tung, and W. A. Terre. Integrated two-color detection for advanced focal plane array (FPA) applications. Proc. SPIE, 1994, 2274, 117. https://doi.org/10.1117/12.189237

    Book  Google Scholar 

  3. W. Hu, Z. Ye, L. Liao, H. Chen, L. Chen, R. Ding, L. He, X. Chen, and W. Lu. 128128 Long-wavelength/mid-wavelength two-color HgCdTe infrared focal plane array detector with ultralow spectral cross talk. Opt. Lett., 2014, 39, 5184. https://doi.org/10.1364/OL.39.005184

    Article  PubMed  Google Scholar 

  4. A. V. Voitsekhovskii, S. N. Nesmelov, S. M. Dzyadukh, S. A. Dvoretskii, N. N. Mikhailov, G. Y. Sidorov, and M. V. Yakushev. Diffusion limitation of dark current in the nBn structures based on the MBE HgCdTe. J. Commun. Technol. Electron., 2022, 67, 308. https://doi.org/10.1134/S1064226922030172

    Article  CAS  Google Scholar 

  5. S. Ruffenach, A. Kadykov, V. V. Rumyantsev, J. Torres, D. Coquillat, D. But, S. S. Krishtopenko, C. Consejo, W. Knap, S. Winnerl, M. Helm, M. A. Fadeev, N. N. Mikhailov, S. A. Dvoretskii, V. I. Gavrilenko, S. V. Morozov, and F. Teppe. HgCdTe-based heterostructures for terahertz photonics. APL Mater., 2017, 5, 035503. https://doi.org/10.1063/1.4977781

    Article  CAS  Google Scholar 

  6. A. A. Dubinov, V. Y. Aleshkin, V. I. Gavrilenko, V. V. Rumyantsev, N. N. Mikhailov, S. A. Dvoretskii, V. V. Utochkin, and S. V. Morozov. THz laser generation on a hybrid surface plasmon in a HgCdTe-based structure. Quantum Electron., 2021, 51, 158. https://doi.org/10.1070/QEL17461/XML

    Article  CAS  Google Scholar 

  7. W. H. Chang, T. Lee, and W. M. Lau. An X-ray photoelectron spectroscopic study of chemical etching and chemo-mechanical polishing of HgCdTe. J. Appl. Phys., 1990, 68, 4816. https://doi.org/10.1063/1.346139

    Article  CAS  Google Scholar 

  8. A. Causier, I. Gerard, M. Bouttemy, A. Etcheberry, C. Pautet, J. Baylet, and L. Mollard. Wet etching of HgCdTe in aqueous bromine solutions: A quantitative chemical approach. J. Electron. Mater., 2011, 40, 1823. https://doi.org/10.1007/s11664-011-1660-7

    Article  CAS  Google Scholar 

  9. R. Sporken, R. Kiran, T. Casselman, F. Aqariden, S. Velicu, Y. Chang, and S. Sivananthan. The effect of wet etching on surface properties of HgCdTe. J. Electron. Mater., 2009, 38, 1781. https://doi.org/10.1007/s11664-009-0844-x

    Article  CAS  Google Scholar 

  10. S. H. Lee, H. Shin, H. C. Lee, and C. K. Kim. New surface treatment method for improving the interface characteristics of CdTe/Hg1–xCdxTe heterostructure. J. Electron. Mater., 1997, 26, 556. https://doi.org/10.1007/s11664-997-0193-6

    Article  CAS  Google Scholar 

  11. J. A. Wilson, V. A. Cotton, J. Silberman, D. Laser, W. E. Spicer, and P. Morgen. (HgCd)Te–SiO2 interface structure. J. Vac. Sci. Technol., A, 1983, 1, 1719. https://doi.org/10.1116/1.572215

    Article  CAS  Google Scholar 

  12. T. James, C. A. Musca, J. Antoszewski, J. M. Dell, and L. Faraone. Investigation of Surface Passivation of HgCdTe MWIR Photodiode Arrays via a Flood Illumination Technique. In: Conference on Optoelectronic and Microelectronic Materials and Devices: Proc., Brisbane, QLD, Australia, Dec. 8-10, 2004. IEEE, 2005, 185-188. https://doi.org/10.1109/COMMAD.2004.1577522

    Book  Google Scholar 

  13. B. Gnade, A. Simmons, D. Little, and R. Strong. Determination of the composition of HgCdTe oxide films by neutron activation analysis. Nucl. Instrum. Methods Phys. Res., Sect. B, 1987, 24/25, 1014. https://doi.org/10.1016/S0168-583X(87)80301-4

    Article  Google Scholar 

  14. Y. Li, X. Yi, and L. Cai. Study on surface oxidative characterization of LPE HgCdTe epilayer by X-ray photoelectron spectroscopy. Int. J. Infrared Millimeter Waves, 2000, 21, 31. https://doi.org/https://doi.org/10.1023/A:1006634702640

    Article  Google Scholar 

  15. C. Shi-Chen, H. Kuo-Tung, and J. Gwo-Jen. Reflectivity of etched anodic oxide on Hg0.8Cd0.2Te. Mater. Lett., 1992, 14, 119. https://doi.org/10.1016/0167-577X(92)90187-O

    Article  Google Scholar 

  16. R. Nokhwal, V. Srivastav, A. Goyal, B. L. Sharma, S. A. Hashmi, and R. K. Sharma. Surface studies on HgCdTe using non-aqueous iodine-based polishing solution. J. Electron. Mater., 2017, 46, 6795. https://doi.org/10.1007/s11664-017-5764-6

    Article  CAS  Google Scholar 

  17. M. Y. Lee, Y. S. Lee, and H. C. Lee. Behavior of elemental tellurium as surface generation-recombination centers in CdTe/HgCdTe interface. Appl. Phys. Lett., 2006, 88, 204101. https://doi.org/10.1063/1.2203940

    Article  CAS  Google Scholar 

  18. J. B. Varesi, J. D. Benson, M. Jaime-Vasquez, M. Martinka, A. J. Stoltz, and J. H. Dinan. Investigation of HgCdTe surface films and their removal. J. Electron. Mater., 2006, 35, 1443. https://doi.org/10.1007/s11664-006-0281-z

    Article  CAS  Google Scholar 

  19. C. J. Powell and A. J. Jablonski. NIST Electron Inelastic-Mean-Free-Path Database, Ver. 1.2. USA: National Institute of Standards and Technology, 2010. https://doi.org/http://dx.doi.org/10.18434/T48C78

  20. A. V. Naumkin, A. Kraut-Vass, and C. J. Powell. NIST X-ray photoelectron spectroscopy database, Ver. 4.1. USA: National Institute of Standards and Technology, 2008. https://doi.org/10.18434/T4T88K

  21. R. R. Singh, D. Kaushik, D. Gupta, R. K. Sharma, and R. K. Pandey. Investigation of passivation processes for HgCdTe/CdS structure for infrared application. Thin Solid Films, 2006, 510, 235. https://doi.org/10.1016/j.tsf.2005.12.201

    Article  CAS  Google Scholar 

  22. A. S. Tarasov, D. V. Ishchenko, I. O. Akhundov, V. A. Golyashov, A. E. Klimov, S. P. Suprun, E. V. Fedosenko, V. N. Sherstyakova, A. G. Rybkin, O. Y. Vilkov, and O. E. Tereshchenko. Surface chemical treatment effect on (1 1 1) PbSnTe < In > Topological crystalline insulator films. Appl. Surf. Sci., 2021, 569, 150930. https://doi.org/10.1016/J.APSUSC.2021.150930

    Article  CAS  Google Scholar 

  23. A. S. Tarasov, N. N. Mikhailov, S. A. Dvoretsky, R. V. Menshchikov, I. N. Uzhakov, A. S. Kozhukhov, E. V. Fedosenko, and O. E. Tereshchenko. Preparation of atomically clean and structurally ordered surfaces of epitaxial CdTe films for subsequent epitaxy. Semiconductors, 2021, 55, S62. https://doi.org/10.1134/S1063782621090220

    Article  CAS  Google Scholar 

  24. O. E. Tereshchenko. Structure and composition of chemically prepared and vacuum annealed InSb(0 0 1) surfaces. Appl. Surf. Sci., 2006, 252, 7684. https://doi.org/10.1016/j.apsusc.2006.03.068

    Article  CAS  Google Scholar 

  25. O. E. Tereshchenko, D. Paget, P. Chiaradia, E. Placidi, J. E. Bonnet, F. Wiame, and A. Taleb-Ibrahimi. Chemically prepared well-ordered InP(0 0 1) surfaces. Surf. Sci., 2006, 600, 3160. https://doi.org/10.1016/j.susc.2006.05.056

    Article  CAS  Google Scholar 

  26. O. E. Tereshchenko, D. Paget, A. C. H. Rowe, V. L. Berkovits, P. Chiaradia, B. P. Doyle, and S. Nannarone. Clean reconstructed InAs(1 1 1) A and B surfaces using chemical treatments and annealing. Surf. Sci., 2009, 603, 518. https://doi.org/10.1016/j.susc.2008.12.014

    Article  CAS  Google Scholar 

  27. J. S. Hammond, S. W. Gaarenstroom, and N. Winograd. X-ray photoelectron spectroscopic studies of cadmium- and silver-oxygen surfaces. Anal. Chem., 1975, 47, 2193. https://doi.org/10.1021/AC60363A019/ASSET/AC60363A019.FP.PNG_V03

    Article  CAS  Google Scholar 

  28. M. Seelmann-Eggebert. Effect of cleanings on the composition of HgCdTe surfaces. J. Vac. Sci. Technol. B Microelectron. Nanom. Struct., 1992, 10, 1297. https://doi.org/10.1116/1.585859

    Article  CAS  Google Scholar 

  29. S. S. Choi and G. Lucovsky. Native oxide formation on CdTe. J. Vac. Sci. Technol. B Microelectron. Process. Phenom., 1998, 6, 1198. https://doi.org/10.1116/1.584278

    Article  CAS  Google Scholar 

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Funding

This study was funded by the Russian Science Foundation (project No. 21-72-10134).

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Authors and Affiliations

  1. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

    E. R. Zakirov, V. G. Kesler, G. Y. Sidorov, V. A. Golyashov, O. E. Tereshchenko, D. V. Marin & M. V. Yakushev

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  1. E. R. Zakirov
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  2. V. G. Kesler
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  3. G. Y. Sidorov
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  4. V. A. Golyashov
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  7. M. V. Yakushev
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Correspondence to E. R. Zakirov.

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Russian Text © The Author(s), 2023, published in Zhurnal Strukturnoi Khimii, 2023, Vol. 64, No. 3, 108216.https://doi.org/10.26902/JSC_id108216

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Zakirov, E.R., Kesler, V.G., Sidorov, G.Y. et al. Wet Chemical Methods of HgCdTe Surface Treatment. J Struct Chem 64, 519–527 (2023). https://doi.org/10.1134/S0022476623030150

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  • DOI: https://doi.org/10.1134/S0022476623030150

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