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MICROSTRUCTURE OF IRIDIUM ENRICHED PtxIr(1–x) FILMS PREPARED BY CHEMICAL VAPOR DEPOSITION

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Abstract

MOCVD processes for the fabrication of PtxIr(1–x) films (x < 0.3, thickness 1.5-1.8 µm) on the contacts of diagnostic electrodes and titanium discs are developed using a combination of Pt(II) and Ir(I) acetylacetonate (acac) derivatives (Pt(acac)2, Ir(cod)(acac) (cod = cyclooctadiene-1,5) and oxygen as a gas reagent. It is shown that the ratios of metals in the films prepared on different types of supports are similar within the same experiment. The films contain phases of solid solution PtxIr(1–x) without admixtures of metallic and oxide phases; the ratio of metals in the sample volume corresponds to the one experimentally specified. EDS and XPS methods determine a lower iridium content after the formation of PtxIr(1–x) films in the subsurface layers (10 nm) than the XRD method. The surface of PtxIr(1–x) films consists of agglomerates formed by small particles. When the Pt content decreases from x = 0.3 to x = 0.2, the average size of these particles decreases from 29 nm to 24–25 nm and then remains virtually constant. The capacitance values of contacts with PtxIr(1–x) films vary within 62.6-84.5 mC/cm2.

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REFERENCES

  1. R. J. Selvaraj, P. Picton, K. Nanthakumar, S. Mak, and V. S. Chauhan. J. Am. Coll. Cardiol., 2007, 49(3), 338. https://doi.org/10.1016/j.jacc.2006.08.056

    Article  PubMed  Google Scholar 

  2. S. F. Cogan. Annu. Rev. Biomed. Eng., 2008, 10, 275. https://doi.org/10.1146/annurev.bioeng.10.061807.160518

    Article  CAS  PubMed  Google Scholar 

  3. T. V. Basova, E. S. Vikulova, S. I. Dorovskikh, A. Hassan, and N. B. Morozova. Mater. Des., 2021, 109672. https://doi.org/10.1016/j.matdes.2021.109672

    Article  CAS  Google Scholar 

  4. S. Y. Huang, M. Eggers, M. J. McArthur, K. A. Dixon, A. McWatters, S. Dria, L. R. Hill, M. P. Melancon, and J. R. Steele, M.J. Wallace. Radiology, 2017, 285(3), 820. https://doi.org/10.1148/radiol.2017161880

    Article  PubMed  Google Scholar 

  5. A. Cowley. Platinum Met. Rev., 2011, 55(2), 98. https://doi.org/10.1595/147106711x566816

    Article  Google Scholar 

  6. A. Carnicer-Lombarte, H. T. Lancashire, and A. Vanhoestenberghe. J. Neural Eng., 2017, 14(3), 036012. https://doi.org/10.1088/1741-2552/aa6557

    Article  PubMed  Google Scholar 

  7. E. P. Ivanova, K. Bazaka, R. J. Crawford. New Functional Biomaterials for Medicine and Healthcare. Woodhead: New Delhi, India, 2013, 210–225.

  8. L. Bai, C. Gong, X. Chen, Y. Sun, J. Zhang, L. Cai, S. Zhu, and S. Q. Xie. Metals, 2019, 9(9), 2004. https://doi.org/10.3390/met9091004

    Article  CAS  Google Scholar 

  9. A. N. Dalrymple, M. Huynh, B. A. Nayagam, C. D. Lee, G. R. Weiland, A. Petrossians, and R. K. Shepherd. J. Neural Eng., 2020, 17(3), 036012. https://doi.org/10.1088/1741-2552/ab933d

    Article  PubMed  Google Scholar 

  10. E. S. Vikulova, Kal’nyi, D. B., Y. V. Shubin, V. V. Kokovkin, N. B. Morozova, A. Hassan, and T. V. Basova. Appl. Surf. Sci., 2017, 425, 1052. https://doi.org/10.1016/j.apsusc.2017.07.100

    Article  CAS  Google Scholar 

  11. A. Norlin, J. Pan, and C. Leygraf. J. Electrochem. Soc., 2005, 152(2), J7. https://doi.org/10.1149/1.1972981

    Article  CAS  Google Scholar 

  12. A. Petrossians, J. J. Whalen, J. D. Weiland, and F. Mansfeld. In: EMBS: 2011 Ann. Int. Conf. IEEE, 2011, 3001. https://doi.org/10.1109/IEMBS.2011.6090823

  13. E. G. Ganske, E. van. Slavcheva, A. Ooyen, W. Mokwa, and U. Schnakenberg. Thin Solid Films, 2011, 519(11), 3965. https://doi.org/10.1016/j.tsf.2011.01.344

    Article  CAS  Google Scholar 

  14. S. C. Colindres, J. R. V. García, J. A. T. Antonio, and C. A. Chavez. J. Alloys Compd., 2009, 483, 406. https://doi.org/10.1016/j.jallcom.2008.08.097

    Article  CAS  Google Scholar 

  15. S. I. Dorovskikh, E. S. Vikulova, D. B. Kalnyi, Y. V. Shubin, I. P. Asanov, E. A. Maximovskiy, A. K. Gutakovskiy, N. B. Morozova, and T. V. Basova. J. Mater. Sci.: Mater. Med., 2019, 30(6), 69. https://doi.org/10.1007/s10856-019-6275-1

    Article  CAS  Google Scholar 

  16. N. V. Gelfond, V. V. Krisyk, S. I. Dorovskikh, D. B. Kalnyi, E. A. Maksimovskii, Y. V. Shubin, and N. B. Morozova.J. Struct. Chem., 2015, 56(6), 1215. https://doi.org/10.1016/j.matpr.2019.08.003

    Article  CAS  Google Scholar 

  17. E. S. Vikulova, I. Y. Ilyin, K. I. Karakovskaya, D. A. Piryazev, A. E. Turgambaeva, and N. B. Morozova. J. Coord. Chem., 2016, 69, 2281. https://doi.org/10.1134/S0022476620010126

    Article  CAS  Google Scholar 

  18. K. I. Karakovskaya, S. I. Dorovskikh, E. S. Vikulova, I. Y. Ilyin, K. V. Zherikova, T. V. Basova, and N. B. Morozova. Coatings, 2021. 11(1), 78. https://doi.org/10.3390/coatings11010078

    Article  CAS  Google Scholar 

  19. B. D. Cullity. Elements of X-ray Diffraction. Addison-Wesley: Massachusetts, USA, 1978, 350–379.

  20. Powder Diffraction File, release 2010. International Centre for Diffraction Data: Pennsylvania, USA. http://www.icdd.com/products/pdf2.htm

  21. W. Kraus and G. Nolze. J. Appl. Crystallogr., 1996, 9, 301. https://doi.org/10.1107/S0021889895014920

    Article  CAS  Google Scholar 

  22. M. N. Magomedov. Neorg. Mater, 2020, 56(9), 953.

  23. P. Kuisma-Kursula. X-Ray Spectrom., 2000, 29, 111. https://doi.org/10.1002/(SICI)1097-4539(200001/02)29:1<111::AID-XRS408>3.0.CO;2-W

    Article  CAS  Google Scholar 

  24. M. P. Seah and M. T. Brown. J. Electron Spectrosc. Relat. Phenom., 1998, 95(1), 71. https://doi.org/10.1016/S0368-2048(98)00204-7

    Article  CAS  Google Scholar 

  25. J. M. Doña Rodríguez, J. A. H. Melián, and J. P. Peña. J. Chem. Educ., 2000, 77(9), 1195. https://doi.org/10.1021/ed077p1195

    Article  Google Scholar 

  26. N. B. Morozova, P. P. Semyannikov, S. V. Trubin, P. A. Stabnikov, A. A. Bessonov, K. V. Zherikova, andI. K. Igumenov. J. Therm. Anal. Calorim., 2009, 96, 261. https://doi.org/10.1007/s10973-008-9551-8

    Article  CAS  Google Scholar 

  27. I. K. Igumenov, N. V. Gelfond, N. B. Morozova, and H. Nizard. Chem. Vap. Deposition, 2007, 13(11), 56. https://doi.org/10.1002/cvde.200706602

    Article  CAS  Google Scholar 

  28. P. Schmitt, V. Beladiya, N. Felde, P. Paul, F. Otto, T. Fritz, and A. V. Szeghalmi. Coatings, 2021, 11(2), 173. https://doi.org/10.1039/coatings-11-00173-s001

  29. S. Yang, X. Yua, Chen. Tan, Y. Wang, H. Ma, K. Liu, and H. Cai. Appl. Surf. Sci., 2015, 329, 248. https://doi.org/10.1016/j.apsusc.2014.12.146

    Article  CAS  Google Scholar 

  30. S. I. Dorovskikh, G. I. Zharkova, A. E. Turgambaeva, V. V. Krisyuk, and N. B. Morozova. Appl. Organomet. Chem., 2017, 31(7), e3654. https://doi.org/10.1002/aoc.3654

    Article  CAS  Google Scholar 

  31. E. Slavcheva, R. Vitushinsky, W. Mokwa, and U. Schnakenberg. J. Electrochem. Soc., 2004, 151, E226. https://doi.org/10.1149/1.1747881

    Article  CAS  Google Scholar 

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Funding

This work was funded by the Russian Science Foundation, project No. 20-15-00222.

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

    S. I. Dorovskikh, E. S. Vikulova, I. V. Korolkov, E. A. Maksimovskiy, D. B. Kal’nyi & N. B. Morozova

  2. Kemerovo State University, Kemerovo, Russia

    I. V. Korolkov

  3. Novosibirsk State University, Novosibirsk, Russia

    D. B. Kal’nyi

Authors
  1. S. I. Dorovskikh
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  2. E. S. Vikulova
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  3. I. V. Korolkov
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  4. E. A. Maksimovskiy
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  5. D. B. Kal’nyi
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  6. N. B. Morozova
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Correspondence to S. I. Dorovskikh.

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Russian Text © The Author(s), 2021, published in Zhurnal Strukturnoi Khimii, 2021, Vol. 62, No. 9, pp. 1546-1555.https://doi.org/10.26902/JSC_id79948

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Dorovskikh, S.I., Vikulova, E.S., Korolkov, I.V. et al. MICROSTRUCTURE OF IRIDIUM ENRICHED PtxIr(1–x) FILMS PREPARED BY CHEMICAL VAPOR DEPOSITION. J Struct Chem 62, 1447–1456 (2021). https://doi.org/10.1134/S0022476621090146

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