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Chemical Vapor Deposition of Silicon Nanoparticles on the Surface of Multiwalled Carbon Nanotubes

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Abstract

Chemical vapor deposition (CVD) along with thermal decomposition of monosilane (SiH4) in a fluidized bed of multiwalled carbon nanotubes (MWCNTs) is used to prepare MWCNT-Si composites containing silicon nanoparticles deposited on the nanotube surfaces. The structure of obtained Si nanoparticles in composites based on MWCNTs with different average diameters is studied by TEM, SEM, XRD, Raman spectroscopy, and FTIR spectroscopy of diffuse reflection. The size of Si particles varies from 3 nm to 45 nm and increases together with the MWCNT diameter. The major part of precipitated silica in the nanoparticles occurs in the amorphous state with small (below 3 nm in size) inclusions of nanocrystalline silicon. Specific discharge capacity of prepared composites used as the anode material for lithium-ion batteries is estimated.

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Funding

The work was carried out within the State Contract for Boreskov Institute of Catalysis SB RAS. The authors thank A.N. Serkova for the SEM study of MWCNT-Si composites.

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Authors and Affiliations

  1. Boreskov Institute of Catalysis, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

    A. V. Zavorin, V. L. Kuznetsov, S. I. Moseenkov & A. V. Ishchenko

  2. Novosibirsk State University, Novosibirsk, Russia

    A. V. Zavorin, Tsog-Ochir Tsendsuren & V. A. Volodin

  3. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

    V. A. Volodin

  4. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

    P. S. Galkin

Authors
  1. A. V. Zavorin
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  2. V. L. Kuznetsov
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  3. S. I. Moseenkov
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  4. Tsog-Ochir Tsendsuren
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  5. V. A. Volodin
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  6. P. S. Galkin
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  7. A. V. Ishchenko
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Correspondence to A. V. Zavorin or V. L. Kuznetsov.

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Additional information

Russian Text © The Author(s), 2020, published in Zhurnal Strukturnoi Khimii, 2020, Vol. 61, No. 4, pp. 648–658.

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Zavorin, A.V., Kuznetsov, V.L., Moseenkov, S.I. et al. Chemical Vapor Deposition of Silicon Nanoparticles on the Surface of Multiwalled Carbon Nanotubes. J Struct Chem 61, 617–627 (2020). https://doi.org/10.1134/S0022476620040162

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  • DOI: https://doi.org/10.1134/S0022476620040162

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