Abstract
Atomically smooth CaF2 and BaF2 layers have been sequentially grown on Si(111) substrates by molecular beam epitaxy. Pore macrodefects have been revealed at the points of the action of an electron beam from a diffractometer when analyzing the crystal structure of the surface during the growth with the subsequent observation using atomic force microscopy. The formation of these macrodefects is associated with the decomposition of fluorides by high-energy electrons, which is accompanied by the desorption of fluorine and the drift current of positive ions from the electron charge drains.
Similar content being viewed by others
References
L. V. Sokolov, A. S. Deryabin, A. I. Yakimov, et al., Fiz. Tverd. Tela 46, 331 (2004) [Phys. Solid State 46, 89 (2004)].
S. Blunier, H. Zogg, C. Maissen, et al., Phys. Rev. Lett. 68, 3599 (1992).
A. Belenchuk, A. Fedorov, H. Huhtinen, et al., Thin Solid Films 358, 277 (2000).
Y. Hirose, S. Horng, A. Kahn, et al., J. Vac. Sci. Technol. A 10, 960 (1992).
C. L. Strecker, W. E. Moddeman, and G. T. Grant, J. Appl. Phys. 52, 6921 (1981).
P. P. Fedorov, I. I. Buchinskaya, N. A. Ivanovskaya, et al., Dokl. Akad. Nauk 401, 652 (2005).
N. S. Sokolov, J. C. Alvarez, S. V. Gastev, et al., J. Crys. Growth 169, 40 (1996).
L. J. Schowalter, R. W. Fathauer, R. P. Goehner, et al., J. Appl. Phys. 58, 302 (1985).
J. Zegenhagen and J. R. Patel, Phys. Rev. B 41, 5315 (1990).
P. W. Tasker, J. Phys. C: Solid State Phys. 12, 4977 (1979).
G. A. Vorob’ev, S. G. Ekhanin, and N. S. Nesmelov, Fiz. Tverd. Tela 47, 1048 (2005) [Phys. Solid State 47, 1083 (2005)].
S. G. Ekhanin, N. S. Nesmelov, and E. V. Nefedtsev, Fiz. Tverd. Tela 32, 409 (1990) [Sov. Phys. Solid State 32, 235 (1990)].
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © S.P. Suprun, D.V. Shcheglov, 2008, published in Pis’ma v Zhurnal Éksperimental’noĭ i Teoreticheskoĭ Fiziki, 2008, Vol. 88, No. 6, pp. 421–425.
Rights and permissions
About this article
Cite this article
Suprun, S.P., Shcheglov, D.V. Effect of an electron beam on CaF2 and BaF2 epitaxial layers on Si. Jetp Lett. 88, 365–369 (2008). https://doi.org/10.1134/S0021364008180057
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0021364008180057