Instruments and Experimental Techniques

, Volume 60, Issue 5, pp 759–763 | Cite as

An ultrahigh-vacuum multifunctional apparatus for synthesis and in situ investigation of low-dimensional structures by spectral magnetoellipsometry in the temperature range of 85–900 K

  • D. V. Shevtsov
  • S. A. Lyaschenko
  • S. N. Varnakov
Laboratory Techniques


This paper presents the results of modernizing an ultrahigh-vacuum multifunctional apparatus that allows one to obtain semiconductor or metallic nanostructures in a single technological cycle and to investigate their optical and magneto-optical properties in a temperature range of 85–900 K. The capabilities of the developed system were demonstrated based on the example of studying the temperature dependence of the bulk Si permittivity via spectral ellipsometric measurements.


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Copyright information

© Pleiades Publishing, Inc. 2017

Authors and Affiliations

  • D. V. Shevtsov
    • 1
    • 2
  • S. A. Lyaschenko
    • 1
    • 2
  • S. N. Varnakov
    • 1
    • 2
  1. 1.Kirenskiy Institute of Physics, Federal Research Center, Siberian BranchRussian Academy of SciencesKrasnoyarskRussia
  2. 2.Reshetnev Siberial State Aerospace UniversityKrasnoyarskRussia

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