Advertisement

Instruments and Experimental Techniques

, Volume 60, Issue 5, pp 759–763 | Cite as

An ultrahigh-vacuum multifunctional apparatus for synthesis and in situ investigation of low-dimensional structures by spectral magnetoellipsometry in the temperature range of 85–900 K

  • D. V. Shevtsov
  • S. A. Lyaschenko
  • S. N. Varnakov
Laboratory Techniques
  • 19 Downloads

Abstract

This paper presents the results of modernizing an ultrahigh-vacuum multifunctional apparatus that allows one to obtain semiconductor or metallic nanostructures in a single technological cycle and to investigate their optical and magneto-optical properties in a temperature range of 85–900 K. The capabilities of the developed system were demonstrated based on the example of studying the temperature dependence of the bulk Si permittivity via spectral ellipsometric measurements.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Li, S.S., Semiconductor Physical Electronics, New York: Springer-Verlag, 2006. doi 10.1007/0-38737766-2CrossRefGoogle Scholar
  2. 2.
    Fert, A. and Grünberg, P.A., Phys.-Usp., 2008, vol. 51, no. 12, p. 1335. doi 10.1103/RevModPhys.80.1517Google Scholar
  3. 3.
    Fujiwara, H., Spectroscopic Ellipsometry. Principles and Application, New York: Wiley, 2007.CrossRefGoogle Scholar
  4. 4.
    Tarasov, I.A., Popov, Z.I., Varnakov, S.N., Molokeev, M.S., Fedorov, A.S., Yakovlev, I.A., Fedorov, D.A., and Ovchinnikov, S.G., J. Exp. Theor. Phys. Lett. (JETP Lett.), 2014, vol. 99, no. 10, p. 565. doi 10.7868/S0370274X14100026ADSCrossRefGoogle Scholar
  5. 5.
    Lyashchenko, S.A., Popov, Z.I., Varnakov, S.N., Popov, E.A., Yakovlev, I.A., Ovchinnikov, S.G., Molokeev, M.S., Kuzubov, A.A., Shamirzaev, T.S., Latyshev, A.V., and Saranin, A.A., J. Exp. Theor. Phys., 2015, vol. 120, no. 5, p. 886. doi 10.1134/S1063776115050155ADSCrossRefGoogle Scholar
  6. 6.
    Kittel, C., Introduction to Solid State Physics, New York: Wiley, 1996.MATHGoogle Scholar
  7. 7.
    Wakagi, M., Fujiwara, H., and Collins, R.W., Thin Solid Films, 1998, vol. 313–314, p. 464. doi 10.1016/S0040-6090(97)00865-1CrossRefGoogle Scholar
  8. 8.
    Lautenschlager, P., Garriga, M., Vina, L., and Cardona, M., Phys. Rev. B: Condens. Matter, 1987, vol. 36, no. 9, p. 4821. https://doi.org/10.1103/PhysRevB.36. 4821ADSCrossRefGoogle Scholar
  9. 9.
    Greben’kova, Y.E., Sokolov, A.E., Eremin, E.V., Edel’man, I.S., Marushchenko, D.A., Zaikovskii, V.I., Chichkov, V.I., Andreev, N.V., and Mukovskii, Y.M., Phys. Solid State, 2013, vol. 55, no. 4, p. 842.ADSCrossRefGoogle Scholar
  10. 10.
    Rykhlitskii, S.V., Shvetz, V.A., Spesivtsev, E.V., Prokopiev, V.Yu., Ovchinnikov, S.G., Zabluda, V.N., Kosyrev, N.N., Varnakov, S.N., and Shevtsov, D.V., Prib. Tekh. Eksp., 2012, vol. 55, no. 2, p. 165.Google Scholar
  11. 11.
    Bystrodeistvuyushchii spektral’nyi ellipsometr. Tekhnicheskoe opisanie i instruktsiya po ekspluatatsii (Quickly Acting Spectral Ellipsometer. Technical Description and Operating Instruction), Novosibirsk: Nauka, 1978.Google Scholar
  12. 12.
    Dash, W.C. and Newman, R., Phys. Rev., 1955, vol. 99, no. 4, p. 1151. https://doi.org/10.1103/PhysRev.99.1151ADSCrossRefGoogle Scholar
  13. 13.
    Van der Meulen, Y.J. and Hien, N.C., J. Opt. Soc. America, 1974, vol. 64, no. 6, p. 804. https://doi.org /10.1364/JOSA.64.000804ADSCrossRefGoogle Scholar
  14. 14.
    Hopper, M.A., Clarke, R.A., and Young, L., J. Electrochem. Soc., 1975, vol. 122, no. 9, p. 1216. doi 10.1149/1.2134428CrossRefGoogle Scholar
  15. 15.
    Jellison G.E., Jr., and Modine, F.A., Phys. Rev. B: Condens. Matter, 1983, vol. 27, no. 12, p. 7466. https://doi.org/10.1103/PhysRevB.27.7466ADSCrossRefGoogle Scholar
  16. 16.
    Postava, K., Aoyama, M., Mistrik, J., Yamaguchi, T., and Shio, K., Appl. Surface Sci., 2007, vol. 254, no. 1, p. 416. doi 10.1016/j.apsusc.2007.07.086ADSCrossRefGoogle Scholar
  17. 17.
    Shvets, V.A., Spesivtsev, E.V., and Rykhlitskiǐ, S.V., Optics Spectrosc., 2004, vol. 97, no. 3, p. 483. doi 10.1134/1.1803656ADSCrossRefGoogle Scholar
  18. 18.
    Nelder, J.A. and Mead, R., The Comp. J., 1965, vol. 7, no. 4, p. 308.CrossRefGoogle Scholar
  19. 19.
    Algazin, Y.B., Blyumkina, Y.A., Grebnev, N.I., Svitashev, K.K., Semenenko, L.V., and Yablontseva, T.M., Optics Spectrosc., 1978, vol. 45, no. 1, p. 183.ADSGoogle Scholar

Copyright information

© Pleiades Publishing, Inc. 2017

Authors and Affiliations

  • D. V. Shevtsov
    • 1
    • 2
  • S. A. Lyaschenko
    • 1
    • 2
  • S. N. Varnakov
    • 1
    • 2
  1. 1.Kirenskiy Institute of Physics, Federal Research Center, Siberian BranchRussian Academy of SciencesKrasnoyarskRussia
  2. 2.Reshetnev Siberial State Aerospace UniversityKrasnoyarskRussia

Personalised recommendations