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An atom probe tomography prototype with laser evaporation

Instruments and Experimental Techniques volume 60, pages 428–433 (2017)Cite this article

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Abstract

The results of development, creation, and tests of an atom-probe prototype with femtosecond laser evaporation and a position-sensitive microchannel detector with delay lines for the tomographic (3D) analysis of chemical composition of materials are presented. The atom-probe tomography is based on the principle of atom-by-atom “disassembling” of materials and projection magnification, which was previously used in field-ion microscopy, as well as the time-of-flight mass spectrometry that is applied to each evaporated ion. The prototype characteristics (mass resolution, spatial resolution, and data-collection efficiency) were demonstrated in study of tungsten.

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Authors and Affiliations

  1. Institute for Theoretical and Experimental Physics named by A.I. Alikhanov of National Research Centre “Kurchatov Institute”, Moscow, 117218, Russia

    S. V. Rogozhkin, A. A. Aleev, A. A. Lukyanchuk, A. S. Shutov & O. A. Raznitsyn

  2. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Moscow, 115409, Russia

    S. V. Rogozhkin, A. A. Aleev, A. A. Lukyanchuk, A. S. Shutov, O. A. Raznitsyn & S. E. Kirillov

Authors
  1. S. V. Rogozhkin
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  2. A. A. Aleev
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  3. A. A. Lukyanchuk
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  4. A. S. Shutov
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  5. O. A. Raznitsyn
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  6. S. E. Kirillov
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Correspondence to S. V. Rogozhkin.

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Original Russian Text © S.V. Rogozhkin, A.A. Aleev, A.A. Lukyanchuk, A.S. Shutov, O.A. Raznitsyn, S.E. Kirillov, 2017, published in Pribory i Tekhnika Eksperimenta, 2017, No. 3, pp. 129–134.

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Rogozhkin, S.V., Aleev, A.A., Lukyanchuk, A.A. et al. An atom probe tomography prototype with laser evaporation. Instrum Exp Tech 60, 428–433 (2017). https://doi.org/10.1134/S002044121702021X

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  • DOI: https://doi.org/10.1134/S002044121702021X