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Instruments and Experimental Techniques

, Volume 49, Issue 5, pp 595–616 | Cite as

Capacitive and barrier discharge excilamps and their applications (Review)

  • M. I. Lomaev
  • E. A. Sosnin
  • V. F. Tarasenko
  • D. V. Shits
  • V. S. Skakun
  • M. V. Erofeev
  • A. A. Lisenko
Article

Abstract

The results of studies, development works, and tests of barrier-and capacitive-discharge excilamps radiating in the UV and VUV spectrum regions are presented. The main information on the designs of radiators and generators is presented. The spectral, temporal, and energy characteristics of excilamps based on the emission of KrCl*, XeCl*, XeI*, XeBr*, KrBr*, Xe*2, Br*2, and Cl*2 molecules and the I* atomic line are described. It is shown that the created generators and sealed-off radiators have long service lives. Examples of specific applications of excilamps are presented.

PACS numbers

42.72.Bj 07.60.-j 42.72.-g 

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Copyright information

© Pleiades Publishing, Inc. 2006

Authors and Affiliations

  • M. I. Lomaev
    • 1
  • E. A. Sosnin
    • 1
  • V. F. Tarasenko
    • 1
  • D. V. Shits
    • 1
  • V. S. Skakun
    • 1
  • M. V. Erofeev
    • 1
  • A. A. Lisenko
    • 1
  1. 1.High Current Electronics Institute, Siberian DivisionRussian Academy of SciencesTomskRussia

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