Abstract—
This paper presents data on ozone detection. The purpose of this work was to find materials offering selectivity in analysis for ozone in air by examining the shape of the resistive response of some thin-film oxide semiconductor sensors operated in thermal modulation mode. For this purpose, thin Pd, Cd, Zn, and W metal layers were produced by sputter deposition on polycrystalline alumina (Al2O3) test structures with Pt electrodes for electrical resistance measurements. Next, the metallic layers were oxidized in air at a temperature of 550°C. The thickness of the resultant PdO, CdO, ZnO, and WO3 oxide films was ~30 nm. The resistive response of the thin-film PdO, CdO, ZnO, and WO3 oxide materials was measured in an ozone–air atmosphere in thermal modulation mode. The temperature of the sensors was varied sinusoidally between 50 and 300°C, and the ozone concentration in air was varied from 25 to 250 ppb. The use of thermal modulation made it possible to reveal differences in the shape of the response between the sensors at different ozone concentrations. The PdO sensor differs significantly in the shape of the resistive response from the other sensors. This characteristic feature of this material opens up the possibility of improving the selectivity of ozone detection with a PdO oxide sensor.
REFERENCES
Korotcenkov, G., Brinzari, V., and Cho, B.K., In2O3- and SnO2-based ozone sensors: design and characterization, Crit. Rev. Solid State Mater. Sci., 2017, vol. 43, no. 2, pp. 83–132. https://doi.org/10.1080/10408436.2017.1287661
Korotcenkov, G., Brinzari, V., and Cho, B.K., In2O3- and SnO2-based ozone sensors: fundamentals, J. Sens., 2016, vol. 2016, p. 816094. https://doi.org/10.1155/2016/3816094
Obvintseva, L.A., Sharova, T.B., Avetisov, A.K., and Sukhareva, I.P., Semiconductor sensors for studying the heterogeneous destruction of ozone at low concentrations, Russ. J. Phys. Chem. A, 2018, vol. 92, no. 6, pp. 1099–1106. https://doi.org/10.1134/S0036024418060122
Ryabtsev, S.V., Ievlev, V.M., Samoylov, A.M., Kuschev, S.B., and Soldatenko, S.A., Microstructure and electrical properties of palladium oxide thin films for oxidizing gases detection, Thin Solid Films, 2017, vol. 636, p. 751. https://doi.org/10.1016/j.tsf.2017.04.009
Ryabtsev, S.V., Shaposhnik, A.V., Samoylov, A.M., Sinelnikov, A.A., Soldatenko, S.A., Kuschev, S.B., and Ievlev, V.M., Thin films of palladium oxide for gas sensors, Dokl. Phys. Chem., 2016, vol. 470, no. 2, pp. 158–161. https://doi.org/10.1134/S0012501616100055
Ievlev, V.M., Ryabtsev, S.V., Samoylov, A.M., Shaposhnik, A.V., Kuschev, S.B., and Sinelnikov, A.A., Thin and ultrathin films of palladium oxide for oxidizing gases detection, Sens. Actuators, B, 2018, vol. 255, no. 2, p. 1335. https://doi.org/10.1016/j.snb.2017.08.121
Ryabtsev, S.V., Ghareeb, D.A.A., Sinelnikov, A.A., Turishchev, S.Yu., Obvintseva, L.A., and Shaposhnik, A.V., Ozone detection by means of semiconductor gas sensors based on palladium(II) oxide, Matter Interph., 2021, vol. 23, no. 1, pp. 56–61. https://doi.org/10.17308/kcmf.2021.23/3303
Ryabtsev, S.V., Ghareeb, D.A.A., Turishchev, S.Yu., Obvintseva, L.A., Shaposhnik, A.V., and Domashevskaya, E.P., Structural and gas-sensing properties of thin PdO semiconductor films of various thicknesses for ozone detection, Fiz. Tekh. Poluprovodn., 2021, vol. 55, no. 11, pp. 1034–1039. https://doi.org/10.21883/FTP.2021.11.51557.9684
Nakata, S., Chemical Analysis Based on Nonlinearity, New York: Nova Science, 2003.
Nakata, S. and Takahara, N., Distinction of gaseous mixtures based on different cyclic temperature modulations, Sens. Actuators, B, 2022, vol. 359, pp. 131615–13621. https://doi.org/10.1016/j.snb.2022.131615
Nakata, S., Hashimoto, T., and Okunishi, H., Evaluation of the responses of a semiconductor gas sensor to gaseous mixtures under the application of temperature modulation, Analyst, 2003, vol. 127, p. 1642. https://doi.org/10.1039/B208295K
Nakata, S. and Kashima, K., Distinction between alcohols and hydrocarbons with a semiconductor gas sensor depending on the range and frequency of a cyclic temperature, Anal. Methods, 2012, vol. 4, p. 1126. https://doi.org/10.1039/c2ay05759j
Ryabtsev, S.V., Obvintseva, L.A., Ghareeb, D.A.A., Al-Habeeb, A.A.K., Shaposhnik, A.V., and Domashevskaya, E.P., Selective analysis for ozone with PdO semiconductor sensors in thermal modulation mode, Sorbts. Khromatogr. Protsessy, 2021, vol. 21, no. 6, pp. 888–893. https://doi.org/10.17308/sorpchrom.2021.21/3835
Funding
This work was supported by the Russian Foundation for Basic Research (grant no. 20-03-00901) and the Russian Federation Ministry of Science and Higher Educatioin (state research target for higher educatiion institutions in 2020–2022, project no. FZGU-2020-0036).
Part of this work (automation of electrical transport measurements) was supported by the Russian Federation Ministry of Science and Higher Educatioin (agreement no. 075-15-2021-1351).
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Ryabtsev, S.V., Obvintseva, N.Y., Ghareeb, D.A. et al. Thin-Film Oxide Materials for Ozone Detection in Thermal Modulation Mode. Inorg Mater 59, 487–493 (2023). https://doi.org/10.1134/S0020168523050151
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DOI: https://doi.org/10.1134/S0020168523050151