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Effect of Ultrasonic Treatment on the Surface Topography of Quartz Glass

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Abstract—

This paper presents our results on ultrasound-induced changes in the surface topography of quartz glass studied using the Allan variance method. The use of this method has made it possible to quantitatively assess roughness components corresponding to surface defects of particular size. Prolonged ultrasonic treatment of quartz glass plates at a power density of 10 W/cm2 has been shown to cause significant changes in surface roughness: the profile height due to small surface defects, 0.125 μm in size, increased by about 40% and the one due to large defects (12 μm) decreased by about 30%. The observed changes in surface topography seem to be related to cavitation destruction of large surface defects by local cumulative jets.

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Authors and Affiliations

  1. Moscow State University, 119991, Moscow, Russia

    B. S. Lunin & A. L. Nikolaev

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  1. B. S. Lunin
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  2. A. L. Nikolaev
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Correspondence to B. S. Lunin.

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Translated by O. Tsarev

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Lunin, B.S., Nikolaev, A.L. Effect of Ultrasonic Treatment on the Surface Topography of Quartz Glass. Inorg Mater 59, 306–310 (2023). https://doi.org/10.1134/S0020168523030093

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