Abstract—
We have studied the effect of annealing conditions on the formation of nickel particles on a titanium nitride barrier layer produced by atomic layer deposition. The results demonstrate that the nanoparticle size depends on annealing temperature and time. At temperatures above 700°C, annealing for more than 5 min results in coalescence, which leads to particle growth and a decrease in the surface density of the particles. During annealing, nickel diffuses into the titanium nitride and the amount of nickel on the surface decreases. The experimental data agree with results of nanoparticle formation modeling in the hydrodynamic model. We have determined the catalyst–buffer interaction potential and melt viscosity, which demonstrate that, in the case of melting of a thin nickel layer, on the order of a few nanometers in thickness, the metal is similar to a supercooled liquid. Modeling results suggest that, during annealing of a thin metal film/barrier layer couple, the average nanoparticle size is smaller at lower potentials of interaction between the constituent materials of the couple.
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ACKNOWLEDGMENTS
We are grateful to K.I. Litvinova for her assistance in preparing the samples, E.P. Kirilenko for performing the Auger spectroscopic work, and L.S. Volkova and M.V. Polyakov for their assistance in the scanning and transmission electron microscopic work.
The investigations were performed in the Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (INME RAS) using Large Scale Research Facility Complex for Heterogeneous Integration Technologies and Silicon + Carbon Nanotechnologies.
Funding
This work was supported by the Russian Federation Ministry of Science and Higher Education, state research target no. 0004-2022-0004.
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Bulyarskiy, S.V., Dudin, A.A., L’vov, P.E. et al. Interaction of a Metallic Catalyst with the Barrier Layer Material during High-Temperature Formation of Nickel Nanoparticles. Inorg Mater 59, 235–241 (2023). https://doi.org/10.1134/S0020168523030020
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DOI: https://doi.org/10.1134/S0020168523030020