Abstract—
Interaction between silicon tetrafluoride and aluminum(III) chloride in the form of SiF4 → SiClF3 → SiCl2F2 → SiCl3F → SiCl4 sequential reactions in a closed reactor has been studied in the temperature range 473–542 K. We have determined effective rate constants and activation energies for the sequential reactions resulting in silicon tetrafluoride conversion into silicon tetrachloride. A technique has been developed for the preparation of isotopically enriched 28SiCl4 from 28SiF4, which includes 28SiCl4 synthesis and distillation purification steps. According to inductively coupled plasma mass spectrometry data, the concentration of elemental impurities in the high-purity 28SiCl4 is at a level of n × 10–1 to n × 10–4 μg/g, and the content of the 28-silicon isotope in the composition of the silicon is 99.99757 ± 0.00060 at %.
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ACKNOWLEDGMENTS
We are grateful to academician M.F. Churbanov, scientific director of the Devyatykh Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, for detailed discussions of this work.
Funding
This work was supported by the Russian Federation Ministry of Science and Higher Education, state research target, research program no. FFSR-2022-0003.
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Troshin, O.Y., Bulanov, A.D., Kirillov, Y.P. et al. Preparation of High-Purity Silicon-28 Tetrachloride from Silicon-28 Tetrafluoride. Inorg Mater 58, 854–859 (2022). https://doi.org/10.1134/S002016852208012X
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DOI: https://doi.org/10.1134/S002016852208012X