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Composition of molecular impurities in high-pure germane

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Abstract

The impurity composition of germane has been studied by gas chromatography/mass spectrometry. We have determined permanent gases, C1–C9 hydrocarbons, fluorine- and chlorine-containing and aromatic hydrocarbons, ethers, hydrogen sulfide, germane homologs, alkyl derivatives of germane, and chlorogermane. The content of some impurities in high-pure germane is 2 × 10–6 to 1 × 10–3 vol %. The detection limits for impurities lie in the range 4 × 10–8 to 5 × 10–5 vol %.

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Correspondence to V. A. Krylov.

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Original Russian Text © V.A. Krylov, O.Yu. Chernova, A.Yu. Sozin, 2015, published in Neorganicheskie Materialy, 2015, Vol. 51, No. 10, pp. 1047–1053.

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Krylov, V.A., Chernova, O.Y. & Sozin, A.Y. Composition of molecular impurities in high-pure germane. Inorg Mater 51, 965–971 (2015). https://doi.org/10.1134/S0020168515090113

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  • DOI: https://doi.org/10.1134/S0020168515090113

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