Abstract
This paper presents thermodynamic analysis of the gas-phase reduction of tantalum chlorides, bromides, and iodides by zinc and cadmium. We consider in detail the reduction process and optimize low-temperature tantalum deposition parameters.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Khimiko-termicheskaya obrabotka metallov i splavov. Spravochnik (Thermochemical Processing of Metals and Alloys: A Handbook), Lyakhovich, L.S., Ed., Moscow: Metallurgiya, 1981.
Lee, S.L., Cipollo, M., Windover, D., and Rickard, C., Analysis of molten salt and sputter deposited coatings on steel cylinders, Report ARCCB-TR-99017 Benet Laboratories, New York: Watervliet, 1999.
Lee, S.L., Cox, J., Windover, D., et al., High-rate sputter-deposited tantalum coatings on a steel liner for wear and erosion mitigation, Report ARCCB-TR-01017 Benet Laboratories, New York: Watervliet, 2001.
Roland, A.L., Investigation of chemically vapor deposited tantalum for medium caliber gun barrel protection, Report of SERDP Project WP-1425, New Jersey: Inst. of Technology, 2008.
Artemenko, N.I., Simonov, V.N., and Trusov, B.G., Thermodynamic analysis of the growth of protective diffusion coatings with a tantalum sublayer on gas turbine blades made from high-temperature nickel alloys, Nauka Obraz., 2013, no. 7, pp. 337–344. doi 10.7464/0713.0583284
Volkov, S.L. and Goncharov, O.Yu., Equilibrium interaction of BCl3 with alkali metal vapors, V Ural’skaya konferentsiya po vysokotemperaturnoi fizicheskoi khimii i elektrokhimii (V Ural Conf. on High-Temperature Physical Chemistry and Electrochemistry), Sverdlovsk, 1989, vol. 1, p. 60.
Goncharov, O.Yu., Faizullin, R.R., and Shadrin, M.G., Gas-phase reduction of molybdenum and tantalum chlorides with cadmium and zinc, Inorg. Mater., 1999, vol. 35, no. 9, pp. 895–898.
Goncharov, O.Yu., Faizullin, R.R., Shadrin, M.G., and Kanunnikov, M.F., Chemical vapor deposition of Mo, Re, and Ta films, Inorg. Mater., 1999, vol. 35, no. 10, pp. 985–987.
Goncharov, O.Yu., Il’in, I.A., Titorov, D.B., and Titorova, D.V., Textures of hafnium boride, molybdenum, and tantalum coatings grown by chemical vapor deposition, Perspekt. Mater., 2008, no. 4, pp. 69–73.
Vatolin, N.A., Moiseev, G.K., and Trusov, B.G., Termodinamicheskoe modelirovanie v vysokotemperaturnykh neorganicheskikh sistemakh (Thermodynamic Modeling in High-Temperature Inorganic Systems), Moscow: Metallurgiya, 1994.
Gurvich, L.V., Iorish, V.S., Chekhovskoy, D.V., and Yungman, V.S., IVTANTERMO: A Thermodynamic Database and Software System for PC. User’s Guide, Boca Raton: CRC, 1993.
Raghavan, V., Fe-Zn (iron-zinc), J. Phase Equilib., 2003, vol. 24, no. 6, pp. 544–545.
Qin, A., Wang, R., Wang, Y., Wang, J., et al., Thermodynamic assessment of the Cd-X (X = Sn, Mn, Fe) systems, CALPHAD: Computer Coupling Phase Diagrams Thermochem., 2014, vol. 47, pp. 83–91.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © O.Yu. Goncharov, R.R. Faizullin, V.N. Guskov, L.Kh. Baldaev, 2015, published in Neorganicheskie Materialy, 2015, Vol. 51, No. 6, pp. 655–659.
Rights and permissions
About this article
Cite this article
Goncharov, O.Y., Faizullin, R.R., Guskov, V.N. et al. Thermodynamic analysis of Ta chemical vapor deposition via the reduction of tantalum halides with cadmium and zinc. Inorg Mater 51, 593–597 (2015). https://doi.org/10.1134/S0020168515060059
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0020168515060059