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Effect of tungsten coating on the properties of high-resistivity gold-doped silicon

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We have studied the effect of tungsten atoms (tungsten coating) on the properties of gold-doped silicon. The coating considerably increased the resistivity of the silicon and markedly reduced the photoconductivity relaxation time. The silicon doped with gold in the presence of tungsten was found to have an energy level with an ionization energy E = E c − (0.23 ± 0.02) eV. In uncoated gold-doped silicon, no energy level with such ionization energy was found. This strongly suggests that the energy level with an ionization energy E = E c − (0.23 ± 0.02) eV is due to tungsten centers.

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References

  1. Milnes, A.G., Deep Impurities in Semiconductors, New York: Wiley, 1973. Translated under the title Primesi s glubokimi urovnyami v poluprovodnikakh, Moscow: Mir, 1977, pp. 1–562.

    Google Scholar 

  2. Fujisaki, Y., Ando, T., Kozuka, Y., and Takano, Y., Characterization of tungsten-related deep levels in bulk silicon crystal, J. Appl. Phys., 1988, vol. 63, no. 7, pp. 2304–2306.

    Article  CAS  Google Scholar 

  3. Voronkova, G.M., Zuev, V.V., Kiryukhin, A.D., et al., Spectral and recombination characteristics of silicon coated with tungsten and heat-treated at high temperatures, Inorg. Mater., 1997, vol. 6, no. 11, pp. 1087–1091.

    Google Scholar 

  4. Wu, R.H. and Peaker, A.R., Capture cross section of the gold donor and acceptor states in N-type Czochralski silicon, Solid-State Electron., 1982, vol. 25, no. 7, pp. 643–649.

    Article  CAS  Google Scholar 

  5. Bykovskii, Yu.A., Voronkova, G.M., Grigor’ev, V.V., et al., Determination of the recombination parameters of a semiconducting material under laser excitation in a microwave field, Preprint of Moscow Engineering Physics Institute, Moscow, 1992, no. 007-92, pp. 1–30.

    Google Scholar 

  6. Ryvkin, S.M., Fotoelektricheskie yavleniya v poluprovodnikakh (Photoelectric Phenomena in Semiconductors), Moscow: Fizmatlit, 1963, pp. 41–46.

    Google Scholar 

  7. Antonova, I.V., Misyuk, A., and Popov, V.P., Formation of oxygen precipitates in silicon, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 1997, vol. 31, no. 38, pp. 998–1002.

    CAS  Google Scholar 

  8. Korshunov, F.P., Bogatyrev, Yu.V., and Vavilov, V.A., Vozdeistvie radiatsii na integral’nye mikroskhemy (Radiation Effect on Integrated Circuits), Moscow: Nauka i Tekhnika, 1986, pp. 30–31.

    Google Scholar 

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Correspondence to S. I. Rasmagin.

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Original Russian Text © S.I. Rasmagin, 2014, published in Neorganicheskie Materialy, 2014, Vol. 50, No. 11, pp. 1165–1168.

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Rasmagin, S.I. Effect of tungsten coating on the properties of high-resistivity gold-doped silicon. Inorg Mater 50, 1075–1077 (2014). https://doi.org/10.1134/S0020168514110144

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