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Physicochemical principles underlying the preparation of high-purity substances for microelectronic and optical applications

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Abstract

This paper presents results on liquid-vapor, solid-vapor, liquid-liquid, and crystal-melt equilibria in solvent-solute systems. The data provide a physicochemical basis for the development of processes for the ultrapurification of volatile compounds of group II to VI elements (halides, hydrides, metalorganic compounds, and elemental substances).

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References

  1. Fedorov, V.A., Manufacture of high-purity arsenic from an unconventional source, Russ. J. Inorg. Chem., 2001, vol. 46,suppl. 2, pp. S87–S105.

    Google Scholar 

  2. Nisel’son, L.A. and Yaroshevskii, A.G., Mezhfazovye koeffitsienty raspredeleniya. Ravnovesiya kristall-zhidkost’ i zhidkost’-par (Distribution Coefficients in Solid-Liquid and Liquid-Vapor Equilibria), Moscow: Nauka, 1992.

    Google Scholar 

  3. Fedorov, V.A., Efremov, A.A., Zhukov, E.G., et al., Preparation of extrapure arsenic from lewisite detoxification products, Ross. Khim. Zh., 1995, vol. 39, no. 3, pp. 46–51.

    CAS  Google Scholar 

  4. Fedorov, V.A., Potolokov, N.A., Nikolashin, S.V., Borisov, S.A., and Menshchikova, T.K., Physical chemistry and technology of the preparation of arsenic from lewisite detoxification products, Ross. Khim. Zh., 2010, vol. 54, no. 4, pp. 56–66.

    CAS  Google Scholar 

  5. Potolokov, V.N., Efremov, V.A., Nikolashin, S.V., Menshchikova, T.K., Zhukov, E.G., and Fedorov, V.A., Liquid-vapor equilibria in the AsCl3-HCl-H2O system, Inorg. Mater., 2006, vol. 42, no. 9, pp. 1027–1033.

    Article  CAS  Google Scholar 

  6. Tolmachev, A.M., Fedorov, V.A., Egorov, E.N., and Nikolashin, S.V., Adsorption techniques for fine purification of substances for microelectronics and optics, Inorg. Mater., 2005, vol. 41, suppl. 1, pp. 75–96.

    Article  Google Scholar 

  7. Fedorov, V.A., Kozlov, S.A., Potolokov, N.A., and Nikolashin, S.V., Preparation of high-purity gallium from semiconductor fabrication waste, Inorg. Mater., 2006, vol. 42,suppl., pp. 70–89.

    Article  CAS  Google Scholar 

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Correspondence to V. A. Fedorov.

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Original Russian Text © S.A. Borisov, T.K. Menshchikova, V.N. Potolokov, V.A. Fedorov, M.N. Brekhovskikh, 2014, published in Neorganicheskie Materialy, 2014, Vol. 50, No. 11, pp. 1243–1248.

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Borisov, S.A., Menshchikova, T.K., Potolokov, V.N. et al. Physicochemical principles underlying the preparation of high-purity substances for microelectronic and optical applications. Inorg Mater 50, 1151–1156 (2014). https://doi.org/10.1134/S002016851411003X

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  • DOI: https://doi.org/10.1134/S002016851411003X

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