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Optical and mechanical properties of hydrogenated amorphous carbon

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Abstract

We have measured the refractive index and microhardness of hydrogenated amorphous carbon films grown on quartz and silicon substrates from a methane-argon mixture under various conditions: E/p = 40–180 V/mPa (E is the electric field between electrodes and p is the gas pressure in the deposition chamber) and substrate temperatures from 50 to 300°C. Such conditions enable the growth of diamond-, polymer-, and graphite-like a-C:H films with wide ranges of microhardness values and refractive indices.

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Authors and Affiliations

  1. Amirkhanov Institute of Physics, Dagestan Scientific Center, Russian Academy of Sciences, ul. Yaragskogo 94, Makhachkala, 367003, Dagestan, Russia

    A. A. Babaev

  2. Dagestan State University, ul. M. Gadzhieva 43a, Makhachkala, 367025, Dagestan, Russia

    M. Sh. Abdulvagabov & Z. A. Agalarova

  3. Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia

    E. I. Terukov

Authors
  1. A. A. Babaev
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  2. M. Sh. Abdulvagabov
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  3. Z. A. Agalarova
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  4. E. I. Terukov
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Correspondence to A. A. Babaev.

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Original Russian Text © A.A. Babaev, M.Sh. Abdulvagabov, Z.A. Agalarova, E.I. Terukov, 2011, published in Neorganicheskie Materialy, 2011, Vol. 47, No. 5, pp. 540–544.

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Babaev, A.A., Abdulvagabov, M.S., Agalarova, Z.A. et al. Optical and mechanical properties of hydrogenated amorphous carbon. Inorg Mater 47, 475–478 (2011). https://doi.org/10.1134/S0020168511050049

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