Abstract
The orientation and microstructure of ZrO2 films produced by oxidizing oriented thin Zr films have been studied by transmission electron microscopy and high-energy electron diffraction. The results demonstrate that biaxial textures of the oxide are governed by the textures of the parent zirconium film. We have established a set of orientation relationships between the Zr and ZrO2 lattices. The nanocrystalline structure of the oxide is due to the fact that there are several equivalent orientations within one Zr grain (multiple-orientation chemoepitaxy). Using high-resolution transmission electron microscopy, we detected twin boundaries, stacking faults, and intragranular dislocations.
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Sikola, T., Spousta, J., Dittrichova, L., and Benes, I., Mechanical Properties of ZrO2-Al2O3 Nanostructured PVD Coatings Evaluated by Nanoindentation, Nucl. Instrum. Methods Phys. Res., Sect. B, 1999, vol. 1, no. 4, pp. 673–680.
Portinha, A., Teixeira, V., Monteiro, A., et al., Surface Analysis of Nanocomposite Ceramic Coatings, Surf. Interface Anal., 2003, vol. 35, no. 9, pp. 723–728.
Javey, A., Kim, H., Brink, M., et al., Dielectrics for Advanced Carbon Nanotube Transistors and Logic Gate, Nat. Mater., 2002, vol. 1, pp. 241–246.
Zhao, S., Ma, F., Song, Z., and Hu, K., Thickness-Dependent Structural and Optical Properties of Sputtered Deposited ZrO2 Films, Opt. Mater., 2008, vol. 30, no. 6, pp. 910–915.
Hasimoto, K., Irie, H., and Fujishima, A., TiO2 Photocatalysis: A Historical Overview and Future Prospects, Jpn. J. Appl. Phys., 2005, vol. 44, no. 12, pp. 8269–8285.
Kusano, E., Kitagawa, M., Kuroda, Y., et al., Adhesion and Hardness of Compositionally Gradient TiO2/Ti/TiN, ZrO2/Zr/ZrN, and TiO2/Ti/Zr/ZrN Coatings, Thin Solid Films, 1998, no. 334, pp. 151–155.
Sung-Wei Yeh, Hsing-Lu Huang, Dershin Gan, and Pouyan Shen, The Oriented Growth of Zirconia Thin Films on NaCl (001) Surface, J. Cryst. Growth, 2006, no. 289, pp. 690–702.
Zhu, L., Fang, Q., He, G., et al., Microstructure and Optical Properties of Ultra-Thin Zirconia Films Prepared by Nitrogen-Assisted Reactive Magnetron Sputtering, Nanotechnology, 2005, no. 16, pp. 2865–2869.
Powder Diffraction File. Alphabetical Index Inorganic Compounds, Pennsylvania: ICPDS, 1997.
Diagrammy sostoyaniya dvoinykh metallicheskikh sistem (Phase Diagrams of Binary Metallic Systems), Lyakishev, N.P., Ed., Moscow: Mashinostroenie, 1996, vol. 1.
Lamasa, D.G., Rossoa, A.M., Anzorenaa, M.S., et al., Crystal Structure of Pure ZrO2 Nanopowders, Scr. Mater., 2006, vol. 55, no. 6, pp. 553–556.
McCullough, J.D. and Trueblood, K.N., The Crystal Structure of Baddeleyite (Monoclinic ZrO2), Acta Crystallogr., 1959, no. 12, pp. 507–511.
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Original Russian Text © V.M. Ievlev, K.A. Solntsev, A.A. Sinel’nikov, S.A. Soldatenko, A.M. Vozgor’kov, 2011, published in Neorganicheskie Materialy, 2011, Vol. 47, No. 4, pp. 458–463.
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Ievlev, V.M., Solntsev, K.A., Sinel’nikov, A.A. et al. Orientation and microstructure of chemoepitaxial ZrO2 films. Inorg Mater 47, 402–407 (2011). https://doi.org/10.1134/S0020168511040133
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DOI: https://doi.org/10.1134/S0020168511040133