Skip to main content
SpringerLink
Log in

Effect of flash lamp annealing on solid-state reactions in (111)Si-Ni-Pt heterostructures

  • Published:
Inorganic Materials Aims and scope

Abstract

The effects of flash annealing with xenon arc lamps (λ = 200–1200 nm) and isothermal annealing for 30 min on the phase composition, orientation, and substructure of Pt(25 nm)-Ni(20 nm)-(111)Si(0.38 mm)-Ni(20 nm)-Pt(25 nm) heterostructures have been studied by transmission electron microscopy. The results indicate that solid-state reactions proceed more rapidly on the side under irradiation in comparison with the opposite side. Flash lamp annealing reduces the temperature threshold for silicide formation by 100–150°C.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Ellwanger, R.S., Morgan, A.E., Stacy, W.T., and Tamminga, J., The Schottky Barrier Height of Platinum Nickel Silicide, J. Vac. Sci. Technol., B, 1983, vol. 1, no. 3, pp. 533–539.

    Article  CAS  Google Scholar 

  2. Lee, P.S., Pey, K.L., Mangelinch, D., et al., New Salicidation Technology with Ni(Pt) Alloy for MOSFETs, IEEE Electron Device Lett., 2001, vol. 22, pp. 568–572.

    Article  CAS  Google Scholar 

  3. Mantovani, S., Nava, F., Nobili, C., et al., Pt-Ni Bilayers on n-Type Silicon: Metallurgical and Electrical Behavior, J. Appl. Phys., 1984, vol. 55, no. 4, pp. 899–908.

    Article  CAS  Google Scholar 

  4. Finstad, T.G. and Nicolet, M-A., Silicide Formation with Bilayers of Pd-Pt, Pd-Ni, and Pt-Ni, J. Appl. Phys., 1979, vol. 50, no. 1, pp. 303–307.

    Article  CAS  Google Scholar 

  5. Ottaviani, G., Tu, K.N., Chu, W.K., et al., NiSi Formation at the NiPt/Si System, J. Appl. Phys., 1982, vol. 53,no. 7, pp. 4903–4906.

    Article  CAS  Google Scholar 

  6. Lee, P.S., Pey, K.L., Mangelinch, D., et al., Layer Inversion of Ni(Pt)Si on Mixed Phase Si Films, Electrochem. Solid-State Lett., 2002, vol. 5, no. 3, pp. G15–G17.

    Article  CAS  Google Scholar 

  7. Ievlev, V.M., Shvedov, E.V., Soldatenko, S.A., et al., Silicide Formation during Isothermal Annealing of Thin Ni-Pt Solid-Solution Films and Pt-Ni Thin-Film Heterostructures on Silicon, Vestn. Voronezh. Gos. Tekh. Univ., Ser.: Materialoved., 2004, no. 1.15, pp. 34–38.

  8. Murarka, S.P., Silicides for VLSI Applications, New York: Academic, 1983.

    Google Scholar 

  9. Lee, P.S., Pey, K.L., Mangelinch, D., et al., On the Morphological Changes of Ni-and Ni(Pt)-Silicides, J. Electrochem. Soc., 2005, vol. 152, no. 4, pp. G305–G308.

    Article  CAS  Google Scholar 

  10. Shibata, T., Sigmon, T.N., Gibbons, J.E., and Regoline, J.L., Silicide Formation Using a Scanning CW Laser Beam, J. Electrochem. Soc., 1981, vol. 128,no. 5, pp. 637–652.

    Article  CAS  Google Scholar 

  11. Tsaur, K.Y., Lian, Z.L., and Mayer, J.W., Ion-Beam-Induced Silicide Formation, Appl. Phys. Lett., 1979, vol. 34, no. 2, pp. 168–170.

    Article  CAS  Google Scholar 

  12. Shibata, T., Gibbons, J.E., and Sigmon, T.N., Silicide Formation Using a Scanning CW Laser Beam, Appl. Phys. Lett., vol. 38, no. 7, pp. 566–569.

  13. Saiton, S., Ishiwara, H., Asano, T., et al., Single Crystalline Silicide Formation, Jpn. J. Appl. Phys., 1981, vol. 20, no. 9, pp. 1649–1656.

    Article  Google Scholar 

  14. Ievlev, V.M., Kushchev, S.B., and Zlobin, V.P., Structure and Composition of Silicides Produced by Flash Lamp Annealing of Pt on Si, Fiz. Khim. Obrab. Mater., 1986, no. 2, pp. 128–130.

  15. Nylandsted Larsen, A., Chevallier, J., and Sorensen, T., Growth of Nickel Silicides on Silicon by Short Duration Incoherent Light Exposure, Funct. Mater., 1999, vol. 6, no. 5, pp. 920–925.

    Google Scholar 

  16. Ievlev, V.M., Kushchev, S.B., and Sanin, V.N., Solid-State Silicide Synthesis via Flash Lamp Annealing of Si-Me (Me = Pt, Pd, Ni, Mo, Ti) Heterosystems, Fiz. Khim. Obrab. Mater., 2002, no. 1, pp. 27–31.

  17. Ievlev, V.M., Kushchev, S.B., Serbin, O.V., et al., Two-Side Flash Lamp Annealing of Me-Si Heterostructures, Vestn. Voronezh. Gos. Tekh. Univ., Ser.: Materialoved., 2001, no. 1.10, pp. 77–79.

  18. Pilipenko, V.A., Bystrye termoobrabotki v tekhnologii SBIS (Rapid Thermal Annealing in VLSI Technology), Minsk: Tsentr BGU, 2004.

    Google Scholar 

  19. Ghozlene, H.B., Beaufrere, P., and Authier, A., Crystallography of PtSi Films on (001) Silicon, J. Appl. Phys., 1978, vol. 49, pp. 3998–4004.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Voronezh State University, Universitetskaya pl. 1, Voronezh, 394006, Russia

    V. M. Ievlev

  2. Voronezh State Technical University, Moskovskii pr. 14, Voronezh, 394026, Russia

    S. A. Soldatenko, S. B. Kushchev & Yu. V. Gorozhankin

Authors
  1. V. M. Ievlev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. A. Soldatenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. B. Kushchev
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Yu. V. Gorozhankin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. M. Ievlev.

Additional information

Original Russian Text © V.M. Ievlev, S.A. Soldatenko, S.B. Kushchev, Yu.V. Gorozhankin, 2008, published in Neorganicheskie Materialy, 2008, Vol. 44, No. 7, pp. 808–815.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ievlev, V.M., Soldatenko, S.A., Kushchev, S.B. et al. Effect of flash lamp annealing on solid-state reactions in (111)Si-Ni-Pt heterostructures. Inorg Mater 44, 705–712 (2008). https://doi.org/10.1134/S0020168508070066

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0020168508070066

Keywords

Search

Navigation