Abstract
We have studied Fe-catalyzed chemical vapor deposition of silicon carbide nanofibers via thermal decomposition of methyltrichlorosilane, CH3SiCl3, in hydrogen at temperatures from 1100 to 1350°C and the effects of synthesis temperature and time and gas (CH3SiCl3 + H2) flow rate on the growth rate of SiC nanofibers. In the temperature range 1100–1350°C, the activation energy for nanofiber growth is 120 kJ/mol. The SiC nanofibers have the stoichiometric composition and consist of single-crystal β-SiC (cubic structure).
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Original Russian Text © P.M. Silenko, A.N. Shlapak, T.V. Tomila, A.I. Bykov, L.N. Kuz’menko, I.Yu. Okun’, A.V. Ragulya, 2008, published in Neorganicheskie Materialy, 2008, Vol. 44, No. 4, pp. 455–461.
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Silenko, P.M., Shlapak, A.N., Tomila, T.V. et al. Fe-catalyzed synthesis of SiC nanofibers from methyltrichlorosilane. Inorg Mater 44, 388–394 (2008). https://doi.org/10.1134/S0020168508040110
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DOI: https://doi.org/10.1134/S0020168508040110