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Atomic layer deposition of multilayer ZnTe/CdTe nanostructures

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Abstract

The growth of ultrathin zinc telluride and cadmium telluride films (nanostructures) and multilayer ZnTe/CdTe heterostructures by atomic layer deposition from molecular beams in vacuum is analyzed. The general trends of component chemisorption, growth mechanisms in different temperature ranges, and conditions for layer-by-layer growth are established.

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Authors and Affiliations

  1. St. Petersburg Technological Institute (Technical University), Moskovskii pr. 26, St. Petersburg, 190013, Russia

    Yu. K. Ezhovskii & D. V. Pavlov

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  1. Yu. K. Ezhovskii
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  2. D. V. Pavlov
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Original Russian Text © Yu.K. Ezhovskii, D.V. Pavlov, 2007, published in Neorganicheskie Materialy, 2007, Vol. 43, No. 7, pp. 784–788.

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Ezhovskii, Y.K., Pavlov, D.V. Atomic layer deposition of multilayer ZnTe/CdTe nanostructures. Inorg Mater 43, 692–695 (2007). https://doi.org/10.1134/S0020168507070035

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  • DOI: https://doi.org/10.1134/S0020168507070035

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