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Temperature effect on the structure of ZnSe layers grown by chemical vapor deposition

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Abstract

The heat exchange between the substrate, growing layer, and gas flow in a CVD reactor is analyzed theoretically. The results indicate that the temperature of the gas mixture in the reactor influences the surface temperature of the polycrystalline zinc selenide deposit. Experimental data are presented on the variation of the average grain size across the ZnSe deposit. The thermal conditions of CVD and secondary crystallization during long-term deposition are shown to have a significant effect on the depth distribution of the grain size.

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Authors and Affiliations

  1. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, Nizhni Novgorod, 603950, Russia

    E. M. Gavrishchuk, V. B. Ikonnikov & S. M. Mazavin

  2. Nizhni Novgorod State Technical University, ul. Minina 24, Nizhni Novgorod, 603600, Russia

    L. A. Kuznetsov

Authors
  1. E. M. Gavrishchuk
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  2. V. B. Ikonnikov
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  3. L. A. Kuznetsov
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  4. S. M. Mazavin
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Additional information

Original Russian Text © E.M. Gavrishchuk, V.B. Ikonnikov, L.A. Kuznetsov, S.M. Mazavin, 2006, published in Neorganicheskie Materialy, 2006, Vol. 42, No. 12, pp. 1428–1433.

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Gavrishchuk, E.M., Ikonnikov, V.B., Kuznetsov, L.A. et al. Temperature effect on the structure of ZnSe layers grown by chemical vapor deposition. Inorg Mater 42, 1302–1307 (2006). https://doi.org/10.1134/S0020168506120041

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  • DOI: https://doi.org/10.1134/S0020168506120041

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