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High-resolution Fourier-transform IR spectroscopic determination of impurities in silicon tetrafluoride and silane prepared from it

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Abstract

The impurity compositions of silicon tetrafluoride and silane prepared from it have been determined by high-resolution Fourier-transform IR spectroscopy. In the spectra of SiF4 samples differing in purity, we have identified rovibrational bands arising from Si2F6O, SiF3OH, HF, SiF3H, SiF2H2, SiH3F, CH4, CO2, and CO impurities. Their detection limits lie in the range 9 × 10−5 (CO2) to 3 × 10−3 mol % (Si2F6O). In the spectra of SiH4 samples of different purity, we have detected CH4, CO2, SiF3H, SiF2H2, and SiF4 impurities. Their detection limits lie in the range 8 × 10−5 (CO2) to 1 × 10−3 mol % (SiF4).

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Authors and Affiliations

  1. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, Nizhni Novgorod, 603950, Russia

    L. A. Chuprov & P. G. Sennikov

  2. Institute of Physics (Petrodvorets Branch), St. Petersburg State University, ul. Ulyanovskaya 1, Petrodvorets, 198504, Russia

    K. G. Tokhadze

  3. Lobachevski State University, pr. Gagarina 23, Nizhni Novgorod, 603600, Russia

    S. K. Ignatov

  4. Alfred Wegener Institute Foundation for Polar and Marine Research, Bremerhaven, 27570, Germany

    O. Schrems

Authors
  1. L. A. Chuprov
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  2. P. G. Sennikov
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  3. K. G. Tokhadze
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  4. S. K. Ignatov
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  5. O. Schrems
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Oiginal Russian Text © L.A. Chuprov, P.G. Sennikov, K.G. Tokhadze, S.K. Ignatov, O. Schrems, 2006, published in Neorganicheskie Materialy, 2006, Vol. 42, No. 8, pp. 1017–1024.

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Chuprov, L.A., Sennikov, P.G., Tokhadze, K.G. et al. High-resolution Fourier-transform IR spectroscopic determination of impurities in silicon tetrafluoride and silane prepared from it. Inorg Mater 42, 924–931 (2006). https://doi.org/10.1134/S0020168506080231

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  • DOI: https://doi.org/10.1134/S0020168506080231

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